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Scheduling a Single-Arm Multi-Cluster Tool With a Condition-Based Cleaning Operation 期刊论文
IEEE/CAA Journal of Automatica Sinica, 2023, 卷号: 10, 期号: 10, 页码: 1965-1983
作者:  Qinghua Zhu;  Hongpeng Li;  Cong Wang;  Yan Hou
收藏  |  浏览/下载：4/0  |  提交时间：2023/09/07
Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Highly Textured Assembly of Engineered Si Nanowires for Artificial Synapses Model 期刊论文
ACS APPLIED ELECTRONIC MATERIALS, 2021, 卷号: 3, 期号: 3, 页码: 1375-1383
作者:  Duan, Chunyang;  Zhao, Dong;  Wang, Xiang;  Ren, Bei;  Li, Mengqi
收藏  |  浏览/下载：23/0  |  提交时间：2021/08/31
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:  Xiao, Dezhi;  Ruan, Qingdong;  Liu, Liangliang;  Shen, Jie;  Cheng, Cheng
收藏  |  浏览/下载：22/0  |  提交时间：2020/11/26
Measurement of Wafer Focus by Grating Shearing Interferometry 期刊论文
Applied Sciences-Basel, 2020, 卷号: 10, 期号: 3, 页码: 10217467-1-8
作者:  Wang, Jian;  Hu, Song;  Zhu, Xianchang
收藏  |  浏览/下载：6/0  |  提交时间：2021/05/11
Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors 期刊论文
MATERIALS LETTERS, 2020, 卷号: 273, 页码: 4
作者:  Wang, Y.;  Tong, W. G.;  Han, N.
收藏  |  浏览/下载：2/0  |  提交时间：2020/07/23
Fabrication and Piezoresistive/Piezoelectric Sensing Characteristics of Carbon Nanotube/PVA/Nano-ZnO Flexible Composite 期刊论文
SCIENTIFIC REPORTS, 2020, 卷号: 10, 期号: 1, 页码: 12
作者:  Chen, Shuaichao;  Luo, Jianlin;  Wang, Xiaoli;  Li, Qiuyi;  Zhou, Liucong
收藏  |  浏览/下载：24/0  |  提交时间：2020/07/23
Vertical Chemical Vapor Deposition Growth of Highly Uniform 2D Transition Metal Dichalcogenides 期刊论文
ACS NANO, 2020, 卷号: 14, 期号: 4, 页码: 4646-4653
作者:  Tang, Lei;  Li, Tao;  Luo, Yuting;  Feng, Simin;  Cai, Zhengyang
收藏  |  浏览/下载：47/0  |  提交时间：2021/02/02
Performance evaluation and prediction of the integrated circuit industry in China: A hybrid method 期刊论文
SOCIO-ECONOMIC PLANNING SCIENCES, 2020, 卷号: 69, 页码: 12
作者:  Zhou, Xiaoyang;  Chen, Hao;  Chai, Jian;  Wang, Shouyang;  Lev, Benjamin
收藏  |  浏览/下载：23/0  |  提交时间：2020/05/24
Design and fabrication of 1×N polarization-insensitive beam splitters based on 2D subwavelength gratings 期刊论文
Optics Communications, 2020, 卷号: 456
作者:  Wu, Gang;  Huang, Yongqing;  Duan, Xiaofeng;  Liu, Kai;  Ma, Xiaokai
收藏  |  浏览/下载：5/0  |  提交时间：2020/11/14

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