CORC

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Molecular dynamics simulations of energy effects on atorn F interaction with SiC(100) 期刊论文
2011, 卷号: 60, 期号: 9
作者:  He Ping-Ni;  Lu Xiao-Dan;  Zhao Cheng-Li;  Ning Jian-Ping;  Qing You-Min
收藏  |  浏览/下载:3/0  |  提交时间:2020/01/05
Molecular dynamics simulations of low-energy Cl atoms etching Si(100) surface 期刊论文
2011, 卷号: 60, 期号: 4
作者:  He Ping-Ni;  Ning Jian-Ping;  Qin You-Min;  Zhao Cheng-Li;  Gou Fu-Jun
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/31
Molecular dynamics simulation of temperature effects on CF3+ etching of Si surface 期刊论文
2010, 卷号: 59, 期号: 10, 页码: 7225-7231
作者:  Ning Jian-Ping;  Lue Xiao-Dan;  Zhao Cheng-Li;  Qin You-Min;  He Ping-Ni
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/31


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