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浏览/检索结果: 共6条，第1-6条 帮助 限定条件 专题：上海微系统与信息技术研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A single-wafer-processed XY-Stage fabricated with trench-sidewall doping and refilled-trench isolating technology 期刊论文 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2006, 页码: 860-863 Gu, L; Li, XX; Bao, HF; Liu, B; Wang, YL; Liu, M; Yang, ZX; Cheng, BL 收藏  |  浏览/下载：18/0  |  提交时间：2011/12/17 Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring 期刊论文 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 卷号: 24, 期号: 1, 页码: 16-19 Li, XX; Xu, W; Chen, Y; Luo, L; Gu, L; Liu, M; Cheng, BL; Wang, YL 收藏  |  浏览/下载：11/0  |  提交时间：2011/12/17 SILICON  ACCELEROMETER   A single-wafer-processed XY-Stage fabricated with trench-sidewall doping and refilled-trench isolating technology 期刊论文 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2006, 页码: 860-863 Gu, L; Li, XX; Bao, HF; Liu, B; Wang, YL; Liu, M; Yang, ZX; Cheng, BL 收藏  |  浏览/下载：13/0  |  提交时间：2011/12/17 Single-water-processed trench-sidewall integration and its application in a micro resonant detector for vacuum monitoring 期刊论文 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2006, 卷号: 24, 期号: 1, 页码: 16-19 Li,XX; Xu,W; Chen,Y; Luo,L; Gu,L; Liu,M; Cheng,BL; Wang,YL 收藏  |  浏览/下载：13/0  |  提交时间：2011/12/17 SILICON  ACCELEROMETER   Single-wafer-processed nano-positioning XY-stages with trench-sidewall micromachining technology 期刊论文 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 卷号: 16, 期号: 7, 页码: 1349-1357 Gu, L; Li, XX; Bao, HF; Liu, B; Wang, YL; Liu, M; Yang, ZX; Cheng, BL 收藏  |  浏览/下载：78/0  |  提交时间：2011/11/08 HIGH-ASPECT-RATIO  CRYSTAL SILICON  COMB ACTUATORS  MICROSTRUCTURES  MICROACTUATORS  FABRICATION  MEMS  MASK   Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor 期刊论文 PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2, 2003, 页码: 830-833 Yang, ZX; Li, XX; Wang, YL; Liu, M; Bao, HF; Cheng, BL 收藏  |  浏览/下载：10/0  |  提交时间：2011/12/17 DATA-STORAGE