Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor

	Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor
	Yang, ZX ; Li, XX ; Wang, YL ; Liu, M ; Bao, HF ; Cheng, BL
刊名	PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2
	2003
页码	830-833
关键词	DATA-STORAGE
ISSN号	1930-0395
通讯作者	Yang, ZX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38719]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Yang, ZX,Li, XX,Wang, YL,et al. Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor[J]. PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2,2003:830-833.
APA	Yang, ZX,Li, XX,Wang, YL,Liu, M,Bao, HF,&Cheng, BL.(2003).Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor.PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2,830-833.
MLA	Yang, ZX,et al."Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor".PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 (2003):830-833.