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上海微系统与信息技... [45]
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期刊论文 [45]
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2012 [1]
2010 [1]
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Extra source implantation for suppression floating-body effect in partially depleted SOI MOSFETs
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 卷号: 272, 页码: 128-131
Chen, J
;
Luo, JX
;
Wu, QQ
;
Chai, Z
;
Huang, XL
;
Wei, X
;
Wang, X(重点实验室)
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2013/05/10
Instruments & Instrumentation
Physics
Physics
Nuclear Science & Technology
Atomic
Nuclear
Molecular & Chemical
Effect of annealing on structure and hardness of oxygen-implanted layer on Ti6Al4V by plasma-based ion implantation
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2010, 卷号: 268, 期号: 2, 页码: 135-139
Jinlong, L
;
Mingren, S
;
Xinxin, M
;
Li, XM
;
Zhenlun, S
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2012/03/24
Instruments & Instrumentation
Physics
Physics
Nuclear Science & Technology
Atomic
Nuclear
Molecular & Chemical
Fabrication of Total-Dose-Radiation-Hardened (TDRH) SOI wafer with embedded silicon nanoclusters
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 卷号: 267, 期号: 8-9, 页码: 1489-1491
Wu, AM
;
Wang, X
;
Wei, X
;
Chen, J
;
Chen, M
;
Zhang, ZX
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  |  
浏览/下载:17/0
  |  
提交时间:2012/03/24
RAY PHOTOELECTRON-SPECTROSCOPY
IMPLANTATION
IRRADIATION
NANOCRYSTALS
Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 卷号: 257, 页码: 199-202
Zhanga, EX
;
Zhang, ZX
;
Chen, J
;
Song, ZR
;
Yang, H
;
He, W
;
Tian, H
;
Wang, X
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2012/03/24
BURIED OXIDES
OXYGEN
NITROGEN
HARDNESS
DEFECTS
A-SIO2
Research on nitrogen implantation energy dependence of the properties of SIMON materials
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 卷号: 242, 期号: 1-2, 页码: 585-587
Zhang, EX
;
Sun, JY
;
Chen, J
;
Chen, M
;
Zhang, ZX
;
Li, N
;
Zhang, GQ
;
Wang, X
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2012/03/24
CHARGE
OXYGEN
OXIDES
LAYERS
Influence of thermal treatment on photolummescence of Er-doped Si-rich SiO2 prepared by ion implantation
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 卷号: 242, 期号: 1-2, 页码: 279-281
Zhang, CS
;
Sun, JZ
;
Wang, X
;
Zhang, F
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  |  
浏览/下载:9/0
  |  
提交时间:2012/03/24
THIN-FILMS
ERBIUM
LUMINESCENCE
SILICON
Fabrication of SGOI material by oxidation of an epitaxial SiGe layer on an SOI wafer with H ions implantation
期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 卷号: 234, 期号: 3, 页码: 243-248
Cheng,XL
;
Chen,ZJ
;
Wang,YJ
;
Jin,B
;
Zhang,F
;
Zou,SC
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2012/03/24
HOLE MOBILITY ENHANCEMENT
HIGH-GE FRACTION
STRAINED-SI
INSULATOR SUBSTRATE
N-MOSFETS
ELECTRON
ULTRATHIN
Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator
期刊论文
JOURNAL OF APPLIED PHYSICS, 2005, 卷号: 98, 期号: 5, 页码: 53502-53502
Di, ZF
;
Huang, AP
;
Fu, RKY
;
Chu, PK
;
Shao, L
;
Hochbauer, T
;
Nastasi, M
;
Zhang, M
;
Liu, WL
;
Shen, QW
;
Luo, ST
;
Song, ZT
;
Lin, CG
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2012/03/24
DLC FILMS
SPECTROSCOPY
Effect of N-implantation on the structural and electrical characteristics of Ge2Sb2Te5 phase change film
期刊论文
THIN SOLID FILMS, 2005, 卷号: 478, 期号: 1-2, 页码: 49-55
Liu, B
;
Song, ZT
;
Zhang, T
;
Xia, JL
;
Feng, SL
;
Chen, B
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/03/24
CHANGE OPTICAL DISKS
CRYSTAL-STRUCTURE
RAMAN-SCATTERING
THIN-FILMS
MEMORY
SB
CRYSTALLIZATION
Formation of ultra-thin silicon-on-insulator materials by low-dose low-energy oxygen ion implantation
期刊论文
CHEMICAL PHYSICS LETTERS, 2003, 卷号: 367, 期号: 1-2, 页码: 44-48
Wang, X
;
Chen, J
;
Dong, YM
;
Chen, M
;
Wang, X
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2012/03/24
DISLOCATION DENSITY
SIMOX WAFERS
LAYERS
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