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长春光学精密机械与物... [3]
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期刊论文 [2]
会议论文 [1]
发表日期
2018 [2]
2009 [1]
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专题:长春光学精密机械与物理研究所
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Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings
期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 12, 页码: 6
作者:
Li, C.
;
Zhao, Y. A.
;
Cui, Y.
;
Peng, X. C.
;
Shan, C.
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浏览/下载:4/0
  |  
提交时间:2019/09/17
high-reflective coatings
laser-induced damage
picosecond pulse
ultraviolet-pulsed laser
induced breakdown
Optics
Dye-embedded YAGCe3+@SiO2 composite phosphors toward warm wLEDs through radiative energy transfer preparation, characterization and luminescence properties
期刊论文
Nanoscale, 2018, 卷号: 10, 期号: 47, 页码: 22237-22251
作者:
Pan, G. H.
;
Wu, H. J.
;
He, S.
;
Zhang, L. L.
;
Hao, Z. D.
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  |  
浏览/下载:3/0
  |  
提交时间:2019/09/17
yttrium-aluminum-garnet
fluorescent silica nanoparticles
solvothermal
synthesis
up-conversion
yag powders
emission
ce3+
particles
Chemistry
Science & Technology - Other Topics
Materials Science
Physics
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE)
会议论文
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
Li X.
;
Wang H.
;
Xu J.
;
Li Y.
;
Feng X.
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浏览/下载:11/0
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提交时间:2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work
mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then
the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation
but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.
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