Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings

doi:10.1117/1.Oe.57.12.121908

CORC > 长春光学精密机械与物理研究所 > 中国科学院长春光学精密机械与物理研究所

	Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings
	Li, C.; Zhao, Y. A.; Cui, Y.; Peng, X. C.; Shan, C.; Zhu, M. P.; Wang, J. G.; Shao, J. D.
刊名	Optical Engineering
	2018
卷号	57 期号:12 页码:6
关键词	high-reflective coatings laser-induced damage picosecond pulse ultraviolet-pulsed laser induced breakdown Optics
ISSN号	0091-3286
DOI	10.1117/1.Oe.57.12.121908
英文摘要	The damage properties of multilayer coatings tested with 1064-nm 30-ps pulses are similar to those tested with 355 nm, nanosecond pulses. A kind of HfO2/SiO2 high-reflective (HR) coating is prepared by electron beam evaporation. Laser-induced damage of HfO2/SiO2 HR coatings is tested by 355-nm 7-ns pulses and 1064-nm 30-ps pulses, respectively. Damage morphologies and cross-sectional profiles are characterized using a scanning electron microscope and focused ion beam, respectively. The laser-induced damage thresholds and morphologies in the two tests are compared. The developing processes and damage mechanisms are discussed. Many similarities are found in the two tests: the typical damage morphologies in both tests appeared as micrometer-sized pits when irradiated by low-fluence pulses, while it turned out to be layer delamination when irradiated by high-fluence pulses. Damage onset is nearby the peak of the E-field in the two tests. Damage pits in both tests may be related to thermal stress caused by nanometer-sized isolated absorbers. There are also some differences in the damage properties between two tests: damage pits in 1064-nm 30-ps tests have a much higher density than that in 355-nm 7-ns tests. The detail features and the developing processes of the pits are different. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)
内容类型	期刊论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/60931]
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Li, C.,Zhao, Y. A.,Cui, Y.,et al. Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings[J]. Optical Engineering,2018,57(12):6.
APA	Li, C..,Zhao, Y. A..,Cui, Y..,Peng, X. C..,Shan, C..,...&Shao, J. D..(2018).Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings.Optical Engineering,57(12),6.
MLA	Li, C.,et al."Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings".Optical Engineering 57.12(2018):6.