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Effect of oxygen partial pressure on crystal quality and electrical properties of RF sputtered PZT thin films under the fixed Ar flow and sputtering pressure 期刊论文
Vacuum, 2020, 卷号: 172
作者:  Wang, Xing;  Li, Biao;  Qi, Liping;  Wang, Fengwei;  Ding, Fei
收藏  |  浏览/下载：54/0  |  提交时间：2019/11/29
Effect of the deposition conditions on the properties of photocatalytic WO3 thin films prepared by mid-frequency magnetron sputtering 期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2019, 卷号: 99, 页码: 99-105
作者:  Li, H.;  Mu, Z. X.;  Liu, S. G.;  Zhang, J. L.
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02
Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering 会议论文
Surface and Coatings Technology
作者:  Meng D(孟笛);  Li YG(李玉阁);  Jiang ZT(蒋智韬);  Lei MK(雷明凯)
收藏  |  浏览/下载：12/0  |  提交时间：2019/12/02
Formation of hierarchical porosity in oxidation of Ag films by reactive sputtering deposition of metal oxides via the Kirkendall effect 期刊论文
NANOSCALE, 2019, 卷号: 11, 页码: 10034-10044
作者:  Xu, W.;  Li, C. X.;  Zhang, Q. Y.;  Ma, C. Y.;  Wang, Q.
收藏  |  浏览/下载：18/0  |  提交时间：2019/12/02
Superior-performance TiN films sputtered for capacitor electrodes 期刊论文
JOURNAL OF MATERIALS SCIENCE, 2019, 卷号: 54, 页码: 10346-10354
作者:  Sun, Nana;  Zhou, Dayu;  Shi, Shuyan;  Liu, Feng;  Liu, Wenwen
收藏  |  浏览/下载：28/0  |  提交时间：2019/12/02
Study of nanostructural bismuth oxide films prepared by radio frequency reactive magnetron sputtering 期刊论文
Applied Surface Science, 2019, 卷号: 472, 页码: 165-171
作者:  Meng, L.;  Xu, W.;  Zhang, Q.;  Yang, T.;  Shi, S.
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power 期刊论文
THIN SOLID FILMS, 2019, 卷号: 669, 页码: 377-386
作者:  Chen, H.;  Zheng, B. C.;  Li, Y. G.;  Wu, Z. L.;  Lei, M. K.
收藏  |  浏览/下载：117/0  |  提交时间：2019/12/02
DC substrate bias enables preparation of superior-performance TiN electrode films over a wide process window 期刊论文
MATERIALS RESEARCH BULLETIN, 2019, 卷号: 119
作者:  Sun, Nana;  Zhou, Dayu;  Shi, Shuyan;  Liu, Wenwen;  Zhao, Xiuming
收藏  |  浏览/下载：24/0  |  提交时间：2019/12/02
Scratch behavior and FEM modelling of Cu/Si(100) thin films deposited by modulated pulsed power magnetron sputtering 期刊论文
SURFACE & COATINGS TECHNOLOGY, 2019, 卷号: 363, 页码: 25-33
作者:  Meng, D.;  Li, Y. G.;  Jiang, Z. T.;  Lei, M. K.
收藏  |  浏览/下载：11/0  |  提交时间：2019/12/02
Advances in plasma-wall interaction control for H-mode operation over 100 s with ITER-like tungsten divertor on EAST 期刊论文
NUCLEAR FUSION, 2019, 卷号: 59
作者:  Wang, L.;  Guo, H.Y.;  Ding, F.;  Yu, Y.W.;  Yuan, Q.P.
收藏  |  浏览/下载：45/0  |  提交时间：2019/12/02

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