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	Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power
	Chen, H.; Zheng, B. C.; Li, Y. G.; Wu, Z. L.; Lei, M. K.
刊名	THIN SOLID FILMS
	2019
卷号	669页码:377-386
关键词	Titanium aluminum silicon nitride Coating Modulated pulsed power magnetron sputtering Nanocomposite Fracture toughness Flexibility Hardness
ISSN号	0040-6090
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3222300
专题	大连理工大学
作者单位	Dalian Univ Technol, Surface Engn Lab, Sch Mat Sci & Engn, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Chen, H.,Zheng, B. C.,Li, Y. G.,et al. Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power[J]. THIN SOLID FILMS,2019,669:377-386.
APA	Chen, H.,Zheng, B. C.,Li, Y. G.,Wu, Z. L.,&Lei, M. K..(2019).Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power.THIN SOLID FILMS,669,377-386.
MLA	Chen, H.,et al."Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power".THIN SOLID FILMS 669(2019):377-386.

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