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Inductively coupled plasma etching of two-dimensional InP/InGaAsP-based photonic crystal 期刊论文
acta physica sinica, 2007, 卷号: 56, 期号: 2, 页码: 977-981
Ma XT (Ma Xiao-Tao); Zheng WH (Zheng Wan-Hua); Ren G (Ren Gang); Fan ZC (Fan Zhong-Chao); Chen CH (Chen Chang-Hui)
收藏  |  浏览/下载:22/0  |  提交时间:2010/03/29
Metal-free growth of Si/SiO2 nanowires by annealing SiOx (x < 2) films deposited by PECVD 会议论文
symposium on group-4 semiconductor nanostructures held at the 2004 mrs fall meeting, boston, ma, nov 29-dec 02, 2004
Wang, XX; Zhang, JG; Wang, QM
收藏  |  浏览/下载:202/48  |  提交时间:2010/03/29


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