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浏览/检索结果: 共10条，第1-10条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Analytical solution of squeeze film and thermoelastic damping in bulk resonators 期刊论文 Sensors and Actuators A: Physical, 2019, 卷号: Vol.297, 页码: 111530 作者:  Yuanlong Cao;  Ke Yu;  Kai Feng;  Hanqing Guan;  Yihua Wu 收藏  |  浏览/下载：12/0  |  提交时间：2019/12/13 MEMS  Squeeze film damping  Thermoelastic damping  Quality factor  Improved Fourier series method   Squeeze film damping effect of the micro airflow in a MEMS sealed chamber 期刊论文 2010, 2010 Li Li-wei; Zhu Rong; Zhou Zhao-ying; Ren Jian-xing 收藏  |  浏览/下载：4/0 静电悬浮微硅陀螺的空气阻尼特性 期刊论文 2010, 2010 吴黎明; 董景新; 韩丰田; 刘云峰; WU Liming; DONG Jingxin; HAN Fengtian; LIU Yunfeng 收藏  |  浏览/下载：3/0 MEMS密闭腔内微气流的挤压膜阻尼效应研究 期刊论文 2010, 2010 李丽伟; 朱荣; 周兆英; 任建兴; LI Li-wei; ZHU Rong; ZHOU Zhao-ying; REN Jian-xing 收藏  |  浏览/下载：5/0 Gas damping of an electrostatically levitated micro-silicon gyroscope 期刊论文 2010, 2010 Wu Liming; Dong Jingxin; Han Fengtian; Liu Yunfeng 收藏  |  浏览/下载：3/0 Study of micro-actuator with electrostatic actuating (EI CONFERENCE) 会议论文 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China Sun D.-M.; Dong W.; Wang G.-D.; Liu C.-X.; Chen W.-Y. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed  which is actuated by electrostatic force. Based on the torsion dynamics theory  the technique and relative formula are presented for analyzing the actuating voltage and the switching time  on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10m  length and width of the cantilever beam are 1900 and 1000m  length and width of the balance beam are 100 and 1000m  and distance of the upper and lower electrodes is 55m  respectively. The actuating voltage is about 50 V  and the switching time Toff and Ton are about 5 and 12 ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally  an optical technique is described for the measurement of the actuating voltage and switching time of the device  and the difference between the experimental results and theoretical datum is discussed.   Simulation and optimization on the squeeze-film damping of a novel high-g accelerometer 期刊论文 MICROELECTRONICS JOURNAL, 2006, 卷号: 37, 页码: 383-387 作者:  Yang, ZX;  Li, XX 收藏  |  浏览/下载：3/0  |  提交时间：2019/11/26 high-g accelerometer  squeeze-film damping  curved overload protection  shock response   Study of dynamic response on a MOEMS 22 optical switch (EI CONFERENCE) 会议论文 Optical Transmission, Switching, and Subsystems II, November 9, 2004 - November 11, 2004, Beijing, China Sun D.; Dong W.; Guo W.; Liu C.; Wang G.; Yan X.; Xu B.; Chen W. 收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25 The MOEMS 22 optical switch with slant lower electrode and with torsion beam on silicon is designed and analyzed theoretically. Analytical formulae for the squeeze film damping coefficient and the squeeze film damping moment on the cantilever beam of the optical switch are derived. Based on the torsion dynamics theory  the technique and relative results are presented for analyzing the actuating voltage and the switch time. The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10 m  length and width of the cantilever beam are 1900 and 1000 m  length and width of the balance beam are 100 and 1000 m  shortest spacing between the upper and lower electrodes is 0.05 m  and highness of the lower electrode is 55 m  respectively. The actuating voltage is less than 10 V  and the switching time of Ton and Toff are 1.30ms and 1.25ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on MOEMS optical switch.   The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer 其他 2001-01-01 Xinping Cao; Dacheng Zhang; Ru Huang; Xing Zhang; Yangyuan Wang 收藏  |  浏览/下载：2/0  |  提交时间：2017/12/03 Finite element method(FEM)  mode  squeeze film damping  Finite element method(FEM)  mode  squeeze film damping   The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer 其他 2001-01-01 Cao, XP; Zhang, DC; Huang, R; Zhang, X; Wang, YY 收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13 finite element method (FEM)  mode  squeeze film damping