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	The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer
	Cao, XP ; Zhang, DC ; Huang, R ; Zhang, X ; Wang, YY
	2001
关键词	finite element method (FEM) mode squeeze film damping
英文摘要	A novel triaxial fully-differential-capacitive accelerometer has been designed and fabricated. The accelerometer has three independent yet on a common glass substrate proof-mass detecting the acceleration vector. The designed structures of the accelerometer are analysed in detail theoretically and simulated using FEM program ANSYS. The result of the simulations show the device has sensitivities of about 17fFg(-1), 17fFg(-1) and 16fFg(-1) in the X-axis, Y-axis and Z-axis respectively. The fabrication combines inductively coupled plasma (ICP) high aspect ratio with glass/silicon bonding technology, thus, the devices are implemented very simply.; Engineering, Electrical & Electronic; Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter; CPCI-S(ISTP); 0
语种	英语
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/293955]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Cao, XP,Zhang, DC,Huang, R,et al. The design and fabrication of a miniaturized differential-capacitive triaxial accelerometer. 2001-01-01.

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