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期刊论文 [43]
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Ordered gold-coated glass nano-sting array with large density tips as highly SERS-active chips for detection of trace organophosphorous toxicant
期刊论文
NANOTECHNOLOGY, 2020, 卷号: 31
作者:
Zhao, Qian
;
Liu, Guangqiang
;
Zhang, Hongwen
;
Cai, Weiping
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2020/11/26
gold-coated glass nano-sting arrays
high density nano-tips
colloidal template
reactive ion etching
high performance sers chips
ultrasensitive detection of toxic organophosphorus molecules
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang JW(张景文)
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  |  
浏览/下载:11/0
  |  
提交时间:2020/11/30
reactive ion etching
capacitive coupled discharge
fluid simulation
discharge parameter
large area SiO2 substrates
plasma radial uniformity
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang, Jingwen
;
Fan, Bin
;
Li, Zhiwei
;
Gao, Guohan
;
Li, Bincheng
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2021/05/11
Reactive Ion Etching
Capacitive Coupled Discharge
Fluid Simulation
Discharge Parameter
Large Area Sio2 Substrates
Plasma Radial Uniformity
Gas flow simulation research on reaction chamber of reactive ion etching
会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者:
Zhang, Jingwen
;
Bin, Fan
;
Li, Zhiwei
;
Liu, Xin
;
Li, Bincheng
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2020/11/15
Computer simulation
Electrodes
Gases
Heat transfer
Ions
Manufacture
Mass transfer
Pressure distribution
Reactive ion etching
Surface waves
Commercial software
Distribution profiles
Electrode surfaces
Etching uniformity
Fluent(Ansys)
Gas flow distribution
Heat transfer model
Plasma distribution
Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
作者:
Zheng, Zhou
;
Na, Shuai
;
Chen, Albert I. -Hsiang
;
Li, Zhenhao
;
Wong, Lawrence L. P.
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  |  
浏览/下载:33/0
  |  
提交时间:2018/07/30
Annular element
capacitive micromachined ultrasonic transducer (CMUT)
concentric
deep reactive-ion etching
dual-element
hybrid transducer
Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching
会议论文
Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
作者:
Zhang Jingwen
;
Fan Bin
;
Li Zhiwei
;
Liu Xin
;
Li Bincheng
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2019/08/23
reactive ion etching
Fluent(Ansys)
numerical simulation
pressure distribution
A strong saddle-shaped surface-to-volume ratio effect on the Young's modulus of silicon nanotubes
期刊论文
APPLIED PHYSICS LETTERS, 2018, 卷号: 112
作者:
Yue, Yonghai
;
Gong, Qihua
;
Li, Zhiqin
;
Duan, Huigao
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  |  
浏览/下载:13/0
  |  
提交时间:2019/12/30
Electron beam lithography
Nanotubes
Reactive ion etching
Silicon
Yarn
Device application
In-situ compression
Nano-scale objects
Nanofabrication process
One-dimensional nanomaterials
Silicon nanotubes
Single crystalline silicon
Surface-to-volume ratio
Elastic moduli
Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching
会议论文
作者:
Zhang Jingwen
;
Fan Bin
;
Li Zhiwei
;
Liu Xin
;
Li Bincheng
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/11/15
reactive ion etching
Fluent(Ansys)
numerical simulation
pressure distribution
Process for fabricating microactuator membranes of piezoelectric inkjet print head using multi-step deep reactive ion etching process
期刊论文
MICRO & NANO LETTERS, 2017, 卷号: 12, 页码: 482-485
作者:
Wang, Wenqiang
;
Li, Chen
;
Xu, Wencai
;
Zou, Helin
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/02
microactuators
membranes
ink jet printing
sputter etching
silicon
elemental semiconductors
microactuator membranes
piezoelectric inkjet print head
multistep deep reactive ion etching process
multilayered structures
multilayered actuator membranes
silicon on insulator wafers
notching effect
Si
SiO2
A Sliding-Mode Triboelectric Nanogenerator with Chemical Group Grated Structure by Shadow Mask Reactive Ion Etching
期刊论文
ACS NANO, 2017, 卷号: 11, 期号: 9, 页码: 8796-8803
作者:
Shang Wanyu[1]
;
Gu Guang Qin[2]
;
Yang Feng[3]
;
Zhao Lei[4]
;
Cheng Gang[5]
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/12/23
triboelectric nanogenerator
sliding mode
chemical group grated structure
reactive ion etching
nylon film
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