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Vibration Identification of Folded-MEMS Comb Drive Resonators
期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 8
作者:
Han, Jianxin
;
Li, Lei
;
Jin, Gang
;
Feng, Jingjing
;
Li, Baizhou
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2019/12/11
MEMS
nonlinear vibration
comb drive
primary resonance
A DC DRIVE ELECTROSTATIC COMB ACTUATOR BASED ON SELF-EXCITED VIBRATION
会议论文
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018-01-01
作者:
Zhu, Yangsheng
;
Yan, Xiaojun
;
Qi, Mingjing
;
Liu, Zhiwei
;
Zhang, Xiaoyong
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/30
A DC drive electrostatic comb actuator based on self-excited vibration
会议论文
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
作者:
Zhu, Y.
;
Yan, X.
;
Qi, M.
;
Liu, Z.
;
Zhang, X.
收藏
  |  
浏览/下载:12/0
  |  
提交时间:2019/12/30
DC motors
Electrodes
Electrostatic accelerators
Electrostatic force
Mechanics
MEMS
Comb actuator
Direct current power
Linear motion
Millimeter-scale
Power densities
Self-excited vibrations
Total mass
Vibration frequency
Electrostatic actuators
An Electrostatic Vertical Comb-Drive Micromirror with Self-aligned Assembly
会议论文
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017-01-01
作者:
Fan, Yanjun[1]
;
Cui, Can[2]
;
Yu, Huijun[3]
;
Shen, Wenjiang[4]
;
Wang, Zhi[5]
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/24
MEMS
vertical comb drive
self-aligned
Computation of capacitance and electrostatic forces for the electrostatically driving actuators considering fringe effects
期刊论文
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2015
Fang, Dongming
;
Zheng, Fengjie
;
Chen, Bo
;
Wang, Yu
;
Fang, Yigeng
;
Yang, Pengfei
;
Wen, Xiaolong
;
Peng, Chunrong
;
Xia, Shanhong
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2017/12/03
MEMS COMB DRIVE
LATERAL INSTABILITY
NONLINEAR REGIONS
DISPLACEMENT
FINGERS
DEVICES
MOTION
Finite-Time Stabilization of a Comb-Drive Electrostatic Microactuator
期刊论文
ieee asme transactions on mechatronics, 2012
He, Guangping
;
Geng, Zhiyong
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/11/12
Comb electrostatic microactuators
dynamics
finite-time control
microelectromechanical system (MEMS)
stabilization
NONLINEAR-SYSTEMS
PARALLEL-PLATE
ACTUATED MEMS
TRAVEL RANGE
DESIGN
SIMULATION
Coupled-field finite element analysis of MEMS compound electrostatic actuator by using the ANSYS software
其他
2012-01-01
Chen, Yinjun
;
Chen, Qinghua
;
Li, Yanmei
;
Wu, Wengang
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2015/11/17
Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing
期刊论文
journal of micro nanolithography mems and moems, 2012
Wang, Jiankun
;
Yang, Zhenchuan
;
Yan, Guizhen
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2015/11/13
electrostatic actuator
silicon-on-insulator
asymmetrical comb drive
capacitive position sensing
VERTICAL COMB ELECTRODES
CMOS-MEMS
DRIVE
DESIGN
MICROMIRROR
SENSORS
Design and simulation of fully-symmetrical resonant pressure sensor
其他
2012-01-01
Jiang, Yiwen
;
Du, Xiaohui
;
Zhan, Zhan
;
Xu, Bulei
;
Lv, Wenlong
;
Wang, Lingyun
;
Sun, Daoheng
;
王凌云
;
孙道恒
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2015/07/22
Capacitance
Finite element method
MEMS
Stress concentration
Vacuum
MEMS grating with interdigitated-comb structure
会议论文
Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011, 2012
作者:
Zhang, Heng
;
Yao, Jun
;
Tao, Fenggang
;
Zhuang, Xuye
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2016/11/25
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