Silicon-on-insulator out-of-plane electrostatic actuator with in situ   capacitive position sensing

doi:10.1117/1.JMM.11.3.033006

CORC > 北京大学 > 信息科学技术学院

	Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing
	Wang, Jiankun ; Yang, Zhenchuan ; Yan, Guizhen
刊名	journal of micro nanolithography mems and moems
	2012
关键词	electrostatic actuator silicon-on-insulator asymmetrical comb drive capacitive position sensing VERTICAL COMB ELECTRODES CMOS-MEMS DRIVE DESIGN MICROMIRROR SENSORS
DOI	10.1117/1.JMM.11.3.033006
英文摘要	An out-of-plane electrostatic comb actuator with in situ capacitive position sensing is presented. Asymmetrical vertical combs are used as the comb drives and in differential out-of-plane position sensing capacitors. A spring which can realize out-of-plane translational displacement of high-aspect-ratio structures was designed and analyzed both analytically and numerically. A robust silicon-on-insulator (SOI) process was proposed and verified to successfully fabricate the actuator with asymmetrical combs. The in situ capacitive position sensing capability was realized by the integrated out-of-plane sensing capacitors, and calibrated with the gravity as an acceleration reference. Treated as an accelerometer, the scale factor and nonlinearity of the actuator are evaluated to be 93.4 mV/g and 0.03%, respectively, with the input range of +/- 1 g. The tested static out-of-plane displacement ranges from -0.88 to 1.39 mu m when the actuator is placed horizontally, and -1.16 to 1.25 mu m when placed vertically, both with the supply voltage of 12 volts. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.JMM.11.3.033006]; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Optics; SCI(E); 0; ARTICLE; 3; 11
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/291825]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Wang, Jiankun,Yang, Zhenchuan,Yan, Guizhen. Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing[J]. journal of micro nanolithography mems and moems,2012.
APA	Wang, Jiankun,Yang, Zhenchuan,&Yan, Guizhen.(2012).Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing.journal of micro nanolithography mems and moems.
MLA	Wang, Jiankun,et al."Silicon-on-insulator out-of-plane electrostatic actuator with in situ capacitive position sensing".journal of micro nanolithography mems and moems (2012).