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浏览/检索结果: 共4条，第1-4条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 The application of a helicon plasma source in reactive sputter deposition of tungsten nitride thin films 期刊论文 Plasma Science and Technology, 2022, 卷号: 24 作者:  YANG,Yan;  JI,Peiyu;  LI,Maoyang;  YU,Yaowei;  HUANG,Jianjun 收藏  |  浏览/下载：9/0  |  提交时间：2022/12/22 helicon wave plasma  reactive sputtering  tungsten nitride  plasma diagnosis   Helicon-Wave-Excited Helium Plasma Performance and Wall-Conditioning Study on EAST 期刊论文 IEEE TRANSACTIONS ON PLASMA SCIENCE, 2020, 卷号: 48 作者:  Huang, Tianyuan;  Jin, Chenggang;  Yu, Yaowei;  Hu, Jiansheng;  Yang, Jianhua 收藏  |  浏览/下载：27/0  |  提交时间：2020/11/30 Helicon wave plasma (HWP)  tokamaks  wall conditioning   Control of Ion Species and Energy in High-Flux Helicon-Wave-Excited Plasma Using Ar/N-2 Gas Mixtures 期刊论文 IEEE TRANSACTIONS ON PLASMA SCIENCE, 2018, 卷号: 46, 页码: 895-899 作者:  Huang, Tianyuan;  Jin, Chenggang;  Yang, Yan;  Wu, Xuemei;  Zhuge, Lanjian 收藏  |  浏览/下载：14/0  |  提交时间：2019/11/26 Helicon-wave-excited plasma (HWP)  high-flux atomic nitrogen ion  ion energy distributions   Amorphous silicon nano-particles in a-SiNx : H prepared by helicon wave plasma-enhanced chemical vapour deposition 会议论文 12th International Symposium on Small Particles and Inorganic Clusters, 2005-07-10 作者:  Fu, GS[1];  Yang, YB[2];  Yu, W[3];  Lu, WB[4];  Ding, WG[5] 收藏  |  浏览/下载：1/0  |  提交时间：2019/12/31 amorphous silicon nano-particles  a-SiNx : H  HWP-CVD