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Optimization of residual stress of SiO2/organic silicon stacked layer prepared using inductively coupled plasma deposition 其他
2017-01-01
Hsu, Chia-Hsun; Cho, Yun-Shao; Liu, Ting-Xuan; Chang, Hsi-Wei; Lien, Shui-Yang
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Synthesis of Large Area Crack-free Nanostructured TiO2 with Selective Masking for Cell/Electronics Interfacing 其他
2012-01-01
Li, Nannan; Chen, Shuhui; Chen, Jing
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/16
Evaluation of mechanical parameters of an elastic thin film system by modeling and numerical simulation of telephone cord buckles 其他
2011-01-01
Wang, Shan; Li, Zhiping
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/11
Modifying residual stress and stress gradient in LPCVD Si3N4 film with ion implantation 其他
2006-01-01
Shi, Wendian; Zhang, Haixia; Zhang, Guobing; Li, Zhihong
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/12
Evaluating interface effect on stresses in thin films by a local curvature metrology with high accuracy and resolution 其他
2006-01-01
Wang, Shasha; Chen, Jing; Li, Dachao; Huang, Yubo; Li, Zhihong; Zhang, Wendong
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16
Modifying residual stress and stress gradient in LPCVD SI3N4 film with ion implantation 其他
2005-01-01
Shi, WD; Zhang, HX; Wang, SS; Zhang, GB; Li, ZH
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/10
Study on mechanical performances of thin SiO2 film by micro-bridge methods 其他
2004-01-01
Wang, Y; Zhang, HX; Zhang, TH
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Micro-bridge testing of silicon oxide material 其他
2003-01-01
Zhang, HX; Wang, Y; Zhang, TH; Lu, D
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/13
Failure modes of doubly supported capacitive RF MEMS switches 其他
2002-01-01
Zhang, LX; Zhang, JW; Zhao, YP; Yu, TX
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/16

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