QQ客服 官方微博 反馈留言

浏览/检索结果: 共4条，第1-4条 帮助 限定条件 专题：深圳先进技术研究院    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Fabrication of an ultra-thin low resistance and high stability Ru-Mo-C seedless barrier for advanced Cu dual-damascene interconnects 期刊论文 JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2018 作者:  Lin, Liwei;  Jiao, Guohua;  Lu, Yuanfu;  Liu, Bo;  Zou, Jianxiong 收藏  |  浏览/下载：74/0  |  提交时间：2019/01/31 Investigation of microstructure and properties of ultrathin graded ZrNx self-assembled diffusion barrier in deep nano-vias prepared by plasma ion immersion implantation. 期刊论文 APPLIED SURFACE SCIENCE, 2018 作者:  Zou, Jianxiong;  Liu, Bo;  Lin, Liwei;  Lu, Yuanfu 收藏  |  浏览/下载：40/0  |  提交时间：2019/01/31 Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature. 期刊论文 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2017 作者:  Zou, Jianxiong ;   Dong, Yuming ;   Liu, Bo ;  Lin, Liwei ;  Zhu, Jingjun  收藏  |  浏览/下载：33/0  |  提交时间：2018/02/02 The annealing effects on the micro-structure and properties of RuMoC films as seedless barrier for advanced Cu metallization 期刊论文 JOURNAL OF APPLIED PHYSICS, 2016 作者:  Zou, Jianxiong;  Liu, Bo;  Jiao, Guohua;  Lu, Yuanfu;  Dong, Yuming 收藏  |  浏览/下载：25/0  |  提交时间：2017/01/13