Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature.

	Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature.
	Zou, Jianxiong ; Dong, Yuming ; Liu, Bo ; Lin, Liwei ; Zhu, Jingjun ; Liu, Shifeng ; Li, Qiran ; Liu, Xiang
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	2017
文献子类	期刊论文
英文摘要	In this paper, alpha-Al2O3/Cr2O3 nano-multilayered composite films were studied due to excellent properties of alpha-Al2O3 and template effect of Cr2O3 for the synthesis of alpha-Al2O3 at low temperature. SRIM code was used to simulate the irradiation damage of alpha-Al2O3 /Cr2O3 multilayer films with different single layer thicknesses caused by 60 keV He+, in order to find out a better design of the structure of the multilayer film. alpha-Al2O3/Cr2O3 nano-multilayeredfilms with different single layer thickness were deposited by RF magnetron reactive sputtering on Si (100) at 400 degrees C with Cr2O3 layers as crystallographic templates. The films were injected by 60 keV He with fluences of 0.5 x 10(17), 1 x 10(17) and 2 x 10(17) He/cm(2) at temperature about 573 K to study the microstructural development and surface morphology evolution of alpha-Al2O3/alpha-Al(2)O(3)nano-multilayer films. The simulation results along with the SEM investigation indicated that to obtain better irradiation tolerance, one should design a multilayer with a high proportion of alpha-Al2O3 and more interfaces. The experimental results showed that the microstructures of the alpha-Al2O3 (100 nm)/Cr2O3 (60 nm) multilayers were nano -polycrystalline and remained stable even as the radiation fluences increase to 1 x 10(17) He/cm(2). This suggests the excellent irradiation tolerance of alpha-Al2O3 (100 nm)/Cr2O3 (60 nm) nano-multilayered composite films.
URL标识	查看原文
语种	英语
内容类型	期刊论文
源URL	[http://ir.siat.ac.cn:8080/handle/172644/11621]
专题	深圳先进技术研究院_集成所
作者单位	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
推荐引用方式 GB/T 7714	Zou, Jianxiong , Dong, Yuming , Liu, Bo ,et al. Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature.[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,2017.
APA	Zou, Jianxiong ., Dong, Yuming ., Liu, Bo .,Lin, Liwei .,Zhu, Jingjun .,...&Liu, Xiang.(2017).Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature..NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS.
MLA	Zou, Jianxiong ,et al."Design of alpha-Al2O3/Cr2O3 nano-multilayered composite films with enhanced irradiation tolerance prepared by epitaxial growth at low temperature.".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2017).