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A novel anti-shock silicon etching apparatus for solving diaphragm release problems 外文期刊
2010
作者:  Ye, TC;  Xu, QX;  Jing, YP;  Ou, Y;  Chen, DP
收藏  |  浏览/下载:18/0  |  提交时间:2010/11/26
Study on electrothermally actuated cantilever array for nanolithography 外文期刊
2010
作者:  Chen, DP;  Ye, TC;  Fu, JY
收藏  |  浏览/下载:12/0  |  提交时间:2010/11/26
Modeling and optimal design of multilayer thermal cantilever microactuators 外文期刊
2009
作者:  Fu, JY;  Ou, Y;  Jiao, BB;  Ye, TC;  Chen, DP
收藏  |  浏览/下载:8/0  |  提交时间:2010/11/26
A simple prediction method for composite rectangular microcantilevers with equal width and the dimensional optimization 外文期刊
2009
作者:  Chen, DP;  Jing, YP;  Li, ZG;  Yang, K;  Ye, TC
收藏  |  浏览/下载:8/0  |  提交时间:2010/11/26
Silicon nanocrystals synthesized by electron-beam co-evaporation method and their application for nonvolatile memory 外文期刊
2009
作者:  Jia, R;  Chen, C;  Liu, M;  Li, WL;  Zhu, CX
收藏  |  浏览/下载:14/0  |  提交时间:2010/11/26
Enhanced charge storage characteristics of silicon nanocrystals fabricated by electron-beam coevaporation of Si and SiOx(x=1 or 2) 外文期刊
2009
作者:  Li, WL;  Jia, R;  Chen, C;  Wu, NJ;  Tamotsu, H
收藏  |  浏览/下载:16/0  |  提交时间:2010/11/26
Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating 外文期刊
2009
作者:  Chen, BQ;  Xie, CQ;  Ma, J;  Ye, TC;  Liu, M
收藏  |  浏览/下载:8/0  |  提交时间:2010/11/26
Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining 外文期刊
2008
作者:  Yi, L;  Ou, Y;  Shi, SL;  Ma, J;  Chen, DP
收藏  |  浏览/下载:7/0  |  提交时间:2010/11/26
Phase-type quantum-dot-array diffraction grating 外文期刊
2008
作者:  Wang, CK;  Kuang, LY;  Wang, ZB;  Cao, LF;  Liu, SY
收藏  |  浏览/下载:15/0  |  提交时间:2010/11/26
Two microthermal shear stress sensors: surface micromachined and bulk-bonding micromachined 外文期刊
2008
作者:  Shi, SL;  Yi, L;  Chen, DP;  Ou, Y;  Jing, YP
收藏  |  浏览/下载:13/0  |  提交时间:2010/11/26


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