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Hydrogen annealing effects on epitaxy of SOI wafer 期刊论文
MATERIALS LETTERS, 2005, 卷号: 59, 期号: 2-3, 页码: 361-365
Cheng,XL; Lin,ZL; Wang,YJ; Xiao,HB; Feng,Z; Zou,SC
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
A study of silicon oxynitride film prepared by ion beam assisted deposition 期刊论文
MATERIALS LETTERS, 2004, 卷号: 58, 期号: 17-18, 页码: 2261-2265
Wang,YJ; Cheng,XL; Lin,ZL; Zhang,CS; Xiao,HB; Zhang,F; Zou,SC
收藏  |  浏览/下载:11/0  |  提交时间:2012/03/24
EXISTENCE OF STRUCTURAL INHOMOGENEITY IN ION-BEAM-MODIFIED POLYIMIDE FILMS 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 卷号: 12, 期号: 6, 页码: 3200-3204
XU,XL; XU,D; XU,HL; WANG,R; Zou,SC; DU,GD; XIA,GQ
收藏  |  浏览/下载:54/0  |  提交时间:2012/03/25


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