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Fabrication of novel double-hetero-epitaxial SOT structure Si/gamma-Al2O3/Si 期刊论文
journal of crystal growth, 2003, 卷号: 247, 期号: 3-4, 页码: 255-260
Tan LW; Wang QY; Wang J; Yu YH; Liu ZL; Lin LY
收藏  |  浏览/下载:51/0  |  提交时间:2010/08/12
Very low-pressure VLP-CVD growth of high quality gamma-Al2O3 films on silicon by multi-step process 期刊论文
journal of crystal growth, 2002, 卷号: 236, 期号: 1-3, 页码: 261-266
Tan LW; Zan YD; Wang J; Wang QY; Yu YH; Wang SR; Liu ZL; Lin LY
收藏  |  浏览/下载:81/3  |  提交时间:2010/08/12
Heteroepitaxial growth of novel SOI material Si/gamma-Al2O3/Si 会议论文
symposium on silicon-based heterostructure materials held at the 8th iumrs international conference on electronic materials (iumrs-icem2002), xian, peoples r china, jun 10-14, 2002
Wang QY; Tan LW; Wang J; Yu YH; Lin LY
收藏  |  浏览/下载:13/0  |  提交时间:2010/11/15
Heteroepitaxial growth and annealing of gamma-Al2O3 thin films on silicon 会议论文
symposium on silicon-based heterostructure materials held at the 8th iumrs international conference on electronic materials (iumrs-icem2002), xian, peoples r china, jun 10-14, 2002
Tan LW; Wang J; Wang QY; Yu YH; Lin LY
收藏  |  浏览/下载:19/0  |  提交时间:2010/11/15


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