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科研机构
半导体研究所 [39]
内容类型
期刊论文 [23]
会议论文 [16]
发表日期
2012 [2]
2011 [2]
2010 [1]
2009 [2]
2008 [5]
2007 [6]
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半导体材料 [39]
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Infrared reflectance study of 3C-SiC epilayers grown on silicon substrates
期刊论文
journal of physics d-applied physics, 2012, 卷号: 45, 期号: 24, 页码: 245102
Dong, L
;
Sun, GS
;
Zheng, L
;
Liu, XF
;
Zhang, F
;
Yan, GG
;
Zhao, WS
;
Wang, L
;
Li, XG
;
Wang, ZG
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2013/03/17
Characterization of 4H-SiC substrates and epilayers by Fourier transform infrared reflectance spectroscopy
期刊论文
chinese physics b, 2012, 卷号: 21, 期号: 4, 页码: 47802
Dong, L
;
Sun, GS
;
Zheng, L
;
Liu, XF
;
Zhang, F
;
Yan, GG
;
Zhao, WS
;
Wang, L
;
Li, XG
;
Wang, ZG
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2013/02/07
High-Performance 4H-SiC-Based Metal-Insulator-Semiconductor Ultraviolet Photodetectors With SiO(2) and Al(2)O(3)/SiO(2) Films
期刊论文
ieee electron device letters, 2011, 卷号: 32, 期号: 12, 页码: 1722-1724
Zhang F (Zhang Feng)
;
Sun GS (Sun Guosheng)
;
Huang HL (Huang Huolin)
;
Wu ZY (Wu Zhengyun)
;
Wang L (Wang Lei)
;
Zhao WS (Zhao Wanshun)
;
Liu XF (Liu Xingfang)
;
Yan GG (Yan Guoguo)
;
Zheng L (Zheng Liu)
;
Dong L (Dong Lin)
;
Zeng YP (Zeng Yiping)
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2012/02/22
Determination of the transport properties in 4H-SiC wafers by Raman scattering measurement
期刊论文
chinese physics b, 2011, 卷号: 20, 期号: 3, 页码: article no.33301
作者:
Liu XF
;
Yan GG
;
Zheng L
;
Dong L
收藏
  |  
浏览/下载:38/3
  |  
提交时间:2011/07/05
4H-SiC
Raman scattering
LOPC modes
transport properties
SILICON-CARBIDE
LIGHT
GAP
Multi-wafer 3C-SiC heteroepitaxial growth on Si(100) substrates
期刊论文
chinese physics b, 2010, 卷号: 19, 期号: 8, 页码: art. no. 088101
Sun GS (Sun Guo-Sheng)
;
Liu XF (Liu Xing-Fang)
;
Wang L (Wang Lei)
;
Zhao WS (Zhao Wan-Shun)
;
Yang T (Yang Ting)
;
Wu HL (Wu Hai-Lei)
;
Yan GG (Yan Guo-Guo)
;
Zhao YM (Zhao Yong-Mei)
;
Ning J (Ning Jin)
;
Zeng YP (Zeng Yi-Ping)
;
Li JM (Li Jin-Min)
收藏
  |  
浏览/下载:172/19
  |  
提交时间:2010/09/07
3C-SiC
heteroepitaxial
multi-wafer
uniformity
In-Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD
会议论文
international conference on silicon carbide and related materials, otsu, japan, oct 14-19, 2007
Sun, GS
;
Zhao, YM
;
Wang, L
;
Wang, L
;
Zhao, WS
;
Liu, XF
;
Ji, G
;
Zeng, YP
收藏
  |  
浏览/下载:41/0
  |  
提交时间:2010/03/09
in-situ doping
boron
aluminum
memory effects
hot-wall LPCVD
4H-SiC
Heteroepitaxial Growth of 3C-SiC on Si (111) Substrate using AlN as a Buffer Layer
会议论文
international conference on silicon carbide and related materials, otsu, japan, oct 14-19, 2007
Zhao, YM
;
Sun, GS
;
Liu, XF
;
Li, JY
;
Zhao, WS
;
Wang, L
;
Li, JM
;
Zeng, YP
收藏
  |  
浏览/下载:54/0
  |  
提交时间:2010/03/09
Silicon Carbide
Aluminum Nitride
buffer layer
LPCVD
Fracture properties of silicon carbide thin films charcterized by bulge test of long membranes
会议论文
3rd ieee international conference of nano/micro engineered and molecular systems, sanya, peoples r china, jan 06-09, 2008
Zhou, W
;
Yang, JL
;
Sun, GS
;
Liu, XF
;
Yang, FH
;
Li, JM
收藏
  |  
浏览/下载:49/0
  |  
提交时间:2010/03/09
bulge test fracture property
silicon carbide thin films
Weibull distribution function
Simulation and fabrication of the SiC-based clamped-clamped filter
会议论文
9th international conference on solid-state and integrated-circuit technology, beijing, peoples r china, oct 20-23, 2008
Zhao, YM
;
Ning, J
;
Sun, GS
;
Liu, XF
;
Wang, L
;
Ji, G
;
Wang, L
;
Zhao, WS
;
Li, JM
;
Yang, FH
收藏
  |  
浏览/下载:39/0
  |  
提交时间:2010/03/09
MICROMECHANICAL RESONATORS
FREQUENCY
Valence band offset of InN/4H-SiC heterojunction measured by x-ray photoelectron spectroscopy
期刊论文
applied physics letters, 2008, 卷号: 93, 期号: 24, 页码: art. no. 242107
Zhang BL
;
Sun GS
;
Guo Y
;
Zhang PF
;
Zhang RQ
;
Fan HB
;
Liu XL
;
Yang SY
;
Zhu QS
;
Wang ZG
收藏
  |  
浏览/下载:231/42
  |  
提交时间:2010/03/08
conduction bands
III-V semiconductors
indium compounds
interface states
semiconductor heterojunctions
silicon compounds
valence bands
wide band gap semiconductors
X-ray photoelectron spectra
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