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Rapid thermal annealing of arsenic implanted Si1-xGex epilayers 期刊论文
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 1997, 卷号: 122, 期号: 4, 页码: 639-642
Zou LF; Wang ZG; Sun DZ; Fan TW; Liu XF; Zhang JW
收藏  |  浏览/下载:12/0  |  提交时间:2010/11/17
Aggregation and precipitation in high dose as ion implanted Ge0.5Si0.5 alloy 期刊论文
nuclear instruments & methods in physics research section b-beam interactions with materials and atoms, 1996, 卷号: 119, 期号: 4, 页码: 510-514
Fan TW; Zou LF; Wang ZG; Hemment PLF; Greaves SJ; Watts JF
收藏  |  浏览/下载:19/0  |  提交时间:2010/11/17


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