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The influence of assisted ion beam bombardment on structure and electrical characteristics of HfSiO dielectric synthesized by DIBSD 期刊论文
MICROELECTRONICS RELIABILITY, 2011, 卷号: 51, 期号: 12, 页码: 2115-2118
Yang, XM; Zhuge, LJ; Wu, XM; Yu, T; Ge, SB
收藏  |  浏览/下载：12/0  |  提交时间：2012/04/10
The influence of assisted ion beam bombardment on structure and electrical characteristics of HfSiO dielectric synthesized by DIBSD 期刊论文
MICROELECTRONICS RELIABILITY, 2011, 卷号: 51, 期号: 12, 页码: 2115-2118
Yang, XM; Zhuge, LJ; Wu, XM; Yu, T; Ge, SB
收藏  |  浏览/下载：15/0  |  提交时间：2013/05/10
Smooth Surface Morphology of Hydrogenated Amorphous Silicon Film Prepared by Plasma Enhanced Chemical Vapor Deposition 期刊论文
PLASMA SCIENCE & TECHNOLOGY, 2009, 卷号: 11, 期号: 5, 页码: 569-575
Yan, X; Feng, F; Zhang, J; Wang, YL
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
Study on the orientation of silver films by ion-beam assisted deposition 期刊论文
APPLIED SURFACE SCIENCE, 2008, 卷号: 254, 期号: 6, 页码: 1565-1568
Feng, T; Jiang, BY; Zhuo, S; Wang, X; Liu, XH
收藏  |  浏览/下载：11/0  |  提交时间：2012/03/24
Effect of Argon ion irradiation on grain orientation in platinum thin films 期刊论文
THIN SOLID FILMS, 2005, 卷号: 483, 期号: 1-2, 页码: 411-415
Jiang, BJ; Jiang, J; Ren, CX; Liu, XH; Wang, X; Feng, T; Zhang, ZX; Song, ZT; Zheng, LP
收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24
Effects of heat treatment on luminescence of Er-doped silicon-rich SiO2 prepared by rf co-sputtering 期刊论文
CHINESE PHYSICS LETTERS, 2004, 卷号: 21, 期号: 7, 页码: 1333-1336
Zhang, CS; Xiao, HB; Chen, ZJ; Cheng, XL; Zhang, F
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
Preferred crystal orientation of hafnium films prepared by ion beam assisted deposition 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 卷号: 215, 期号: 3-4, 页码: 413-418
Jiang, BY; Ren, CX; Zheng, ZH; Liu, XH; Fan, HM; Yao, LC; Li, YT; Su, XB
收藏  |  浏览/下载：11/0  |  提交时间：2012/03/24
Surface modification of polytetrafluoroethylene by nitrogen ion implantation 期刊论文
APPLIED SURFACE SCIENCE, 2002, 卷号: 185, 期号: 3-4, 页码: 255-261
Zhang, JH; Yu, XJ; Li, HD; Liu, XH
收藏  |  浏览/下载：27/0  |  提交时间：2012/03/24
Growth of biaxially textured yttria-stabilized zirconia thin films on Si(111) substrate by ion beam assisted deposition 期刊论文
CHINESE PHYSICS LETTERS, 2000, 卷号: 17, 期号: 3, 页码: 221-223
Mu,HC; Ren,CX; Jiang,BY; Ding,XZ; Yu,YH; Wang,X; Liu,XH; Zhou,GE; Jia,YB
收藏  |  浏览/下载：18/0  |  提交时间：2012/03/24
Effect of O-2 pressure on the synthesis of titanium oxide film by ion beam enhanced deposition 期刊论文
MATERIALS LETTERS, 2000, 卷号: 44, 期号: 2, 页码: 105-109
Wang, XH; Zhang, F; Zheng, ZH; Li, CR; Chen, LZ; Wang, HM; Lui, XH
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24

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