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Realization of 850 V breakdown voltage LDMOS on Simbond SOI 期刊论文
MICROELECTRONIC ENGINEERING, 2012, 卷号: 91, 页码: 102-105
Wang, ZJ; Cheng, XH; He, DW; Xia, C; Xu, DW; Yu, YH; Zhang, D; Wang, YY; Lv, YQ; Gong, DW; Shao, K
收藏  |  浏览/下载：21/0  |  提交时间：2013/04/17
Characterization and analysis of silicon on insulator fabricated by separation by implanted oxygen layer transfer 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 卷号: 28, 期号: 1, 页码: 163-168
Wei,X; Wu,AM; Wang,X; Li,XY; Ye,F; Chen,J; Chen,M; Zhang,B; Li,CL; Zhang,M; Wang,X
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24
Investigation on Silicon on Insulator Fabricated by Separation by Implanted Oxygen Layer Transfer 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H81-H85
Wei, X; Wu, AM; Wang, X; Li, XY; Ye, F; Chen, J; Chen, M; Zhang, B; Lin, CL; Zhang, M; Wang, X
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
Gettering layer for oxygen accumulation in the initial stage of SIMOX processing 期刊论文
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2009, 卷号: 267, 期号: 8-9, 页码: 1273-1276
Ou, X; Kogler, R; Skorupa, W; Moller, W; Wang, X; Gerlach, JW
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24
Oxygen gettering in Si by He ion implantation-induced cavity layer 期刊论文
NUCLEAR SCIENCE AND TECHNIQUES, 2009, 卷号: 20, 期号: 4, 页码: 202-207
Ou, X; Zhang, B; Wu, AM; Zhang, M; Wang, X
收藏  |  浏览/下载：15/0  |  提交时间：2012/03/24
The use of nanocavities for the fabrication of ultrathin buried oxide layers 期刊论文
APPLIED PHYSICS LETTERS, 2009, 卷号: 94, 期号: 1, 页码: 11903-11903
Ou, X; Kogler, R; Mucklich, A; Skorupa, W; Moller, W; Wang, X; Vines, L
收藏  |  浏览/下载：19/0  |  提交时间：2012/03/24
Oxygen gettering in Si by He ion implantation-induced cavity layer 期刊论文
NUCLEAR SCIENCE AND TECHNIQUES, 2009, 卷号: 20, 期号: 4, 页码: 202-207
Ou, X; Zhang, B（重点实验室）; Wu, AM; Zhang, M（重点实验室）; Wang, X（重点实验室）
收藏  |  浏览/下载：16/0  |  提交时间：2013/05/10
Fabrication of thin-film silicon on insulator by separation by implanted oxygen layer transfer 期刊论文
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2008, 卷号: 26, 期号: 6, 页码: L45-L47
Wei, X; Wu, AM; Chen, M; Chen, J; Zhang, M; Wang, X; Lin, CL
收藏  |  浏览/下载：13/0  |  提交时间：2012/03/24
Fabrication of Silicon-on-Insulator Wafer by SIMOX Layer Transfer 期刊论文
2008 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS, 2008, 页码: 81-82
Wei, X; Zhang, B; Chen, M; Zhang, M; Wang, X; Lin, CL
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24
Research on total-dose hardening for H-gate PD NMOSFET/SIMOX by ion implanting into buried oxide 期刊论文
CHINESE PHYSICS C, 2008, 卷号: 32, 期号: 2, 页码: 130-134
Qian, C; Zhang, ZX; Zhang, F; Lin, CL
收藏  |  浏览/下载：19/0  |  提交时间：2012/03/24

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