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长春光学精密机械与物... [2]
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期刊论文 [1]
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2018 [1]
2008 [1]
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专题:长春光学精密机械与物理研究所
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Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings
期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 12, 页码: 6
作者:
Li, C.
;
Zhao, Y. A.
;
Cui, Y.
;
Peng, X. C.
;
Shan, C.
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浏览/下载:5/0
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提交时间:2019/09/17
high-reflective coatings
laser-induced damage
picosecond pulse
ultraviolet-pulsed laser
induced breakdown
Optics
Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE)
会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Jin W.
;
Jin C.
;
Zhu H.
;
Liu L.
;
Yang H.
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浏览/下载:19/0
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提交时间:2013/03/25
Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First
Second
Third
alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method
Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra
based on the acquired structure information
the structure information (the thickness of the aluminum and the cap layer
the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally
surface roughness and the diffusion between Al-Al2O 3) is obtained
an induced transmission filter (ITF) is designed and deposited.
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