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Comparison of 355-nm nanosecond and 1064-nm picosecond laser-induced damage in high-reflective coatings 期刊论文
Optical Engineering, 2018, 卷号: 57, 期号: 12, 页码: 6
作者:  Li, C.;  Zhao, Y. A.;  Cui, Y.;  Peng, X. C.;  Shan, C.
收藏  |  浏览/下载:5/0  |  提交时间:2019/09/17
Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Jin W.; Jin C.; Zhu H.; Liu L.; Yang H.
收藏  |  浏览/下载:19/0  |  提交时间:2013/03/25
Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First  Second  Third  alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method  Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra  based on the acquired structure information  the structure information (the thickness of the aluminum and the cap layer  the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally  surface roughness and the diffusion between Al-Al2O 3) is obtained  an induced transmission filter (ITF) is designed and deposited.  


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