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Effects of different Si3N4 thicknesses on the performance of PECVD SiO2/Si3N4 double layers electrets 其他
2008-01-01
Chen, Zhiyu; Zou, Xudong; Zhang, Jinwen
收藏  |  浏览/下载:3/0  |  提交时间:2015/11/10
Investigation on micromachining technology compatibility of PECVD SiO 2/Si3N4 double-layer electrets 其他
2008-01-01
Liu, Jin; Lv, Zhiqiu; Zhang, Jinwen
收藏  |  浏览/下载:3/0  |  提交时间:2015/11/10
Investigation on micromachining technology compatibility of PECVD SiO(2)/Si(3)N(4) double-layer electrets 其他
2008-01-01
Liu, Jin; Lv, Zhiqiu; Zhang, Jinwen
收藏  |  浏览/下载:4/0  |  提交时间:2015/11/13
Effects of Different Si(3)N(4) Thicknesses on the Performance of PECVD SiO(2)/Si(3)N(4) Double Layers Electrets 其他
2008-01-01
Chen, Zhiyu; Zou, Xudong; Zhang, Jinwen
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/13
Predicting duststorm evolution with the vorticity theory 其他
2008-01-01
Choi, H.; Zhang, Y. H.
收藏  |  浏览/下载:5/0  |  提交时间:2015/11/10


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