Investigation on micromachining technology compatibility of PECVD SiO 2/Si3N4 double-layer electrets | |
Liu, Jin ; Lv, Zhiqiu ; Zhang, Jinwen | |
2008 | |
英文摘要 | In this paper PECVD SiO2/Si3N4 double-layer electrets were investigated for their compatibility with micromachining technology, such as conventional lithography and etching techniques. After the experiments, we find that no matter under what condition, either high temperature or high humid condition, could H3PO 4 improve the charge stability of SiO2/Si 3N4 double-layer electrets a little. RIE and oxygen plasma stripping reduce the charge stability significantly. Acetone stripping does not influence the charge stability in high temperature and high humidity. The other techniques, such as BHF, fuming nitric acid stripping, corrosive of Al and Au etc., decrease the charge stability a little. ? 2008 IEEE.; EI; 0 |
语种 | 英语 |
DOI标识 | 10.1109/NEMS.2008.4484323 |
内容类型 | 其他 |
源URL | [http://ir.pku.edu.cn/handle/20.500.11897/153635] |
专题 | 信息科学技术学院 |
推荐引用方式 GB/T 7714 | Liu, Jin,Lv, Zhiqiu,Zhang, Jinwen. Investigation on micromachining technology compatibility of PECVD SiO 2/Si3N4 double-layer electrets. 2008-01-01. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论