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科研机构
清华大学 [3]
沈阳自动化研究所 [2]
西安交通大学 [1]
高能物理研究所 [1]
内容类型
会议论文 [7]
发表日期
2020 [1]
2017 [2]
2011 [1]
2010 [3]
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A Beam Profile Monitor for High Energy Proton Beams Using Microfabrication Techniques
会议论文
Brazil, 2020
作者:
I.M. Mateu
;
W. Farabolini
;
A. Gilardi
;
B. Gkotse
;
A. Mapelli
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2021/05/25
Advanced microfabrication techniques for the development of millimeter-wave wafer-level waveguide devices
会议论文
作者:
Jones, Thomas R.
;
Vahabisani, Nahid
;
Ye, Ming
;
Daneshmand, Mojgan
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/26
Micro electromechanical system (MEMS)
Micro-fabrication techniques
Millimeter-wave components
Millimeter-wave waveguides
RF front end
Wafer level
Waveguide channels
Waveguide device
Patterned microwell arrays for single-cell analysis & drug screening
会议论文
1st International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2017, Montreal, Canada, July 17-21, 2017
作者:
Yang WG(杨文广)
;
Liu LQ(刘连庆)
;
Wang YC(王越超)
;
Yu HB(于海波)
收藏
  |  
浏览/下载:13/0
  |  
提交时间:2017/11/15
micro-well arrays
microfabrication
single-cell
drug screening
A nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
会议论文
6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011
作者:
Wang ZQ(王志迁)
;
Wang D(王栋)
;
Jiao ND(焦念东)
;
Tung, S.
;
Dong ZL(董再励)
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2012/06/06
Atomic force microscopy
Electric fields
Electrodes
Ethanol
MEMS
Microanalysis
Micromachining
Nanofluidics
Nanolithography
Silicon oxides
Fabrication of Si/sub 3/N/sub 4/ micro-components by a combined microfabrication process
会议论文
Key Engineering Materials, International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites (ISASC 2004), Gyeongju, South Korea, INSPEC
Jing-Feng Li
;
Songzhe Jin
;
Yong Li
收藏
  |  
浏览/下载:2/0
Femtosecond laser two-photon microfabrication control and monitoring system based on virtual instruments
会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Gao Guohua
;
Zhu Yu
;
Duan Guanghong
;
Zhang Ming
收藏
  |  
浏览/下载:6/0
Discussion on the improved diffractive superresolution element of the two-photon microfabrication
会议论文
International Technology and Innovation Conference 2006. ITIC 2006, International Technology and Innovation Conference 2006. ITIC 2006, Hangzhou, China, INSPEC
Wei Peng
;
Zhu Yu
;
Tan QiaoFeng
;
Duan GuangHong
收藏
  |  
浏览/下载:5/0
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