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Influence of nitrogen dose on the charge density of nitrogen-implanted buried oxide in SOI wafers 期刊论文
journal of semiconductors, 2010, 卷号: 31, 期号: 2, 页码: 99-102
Zheng Zhongshan; Liu Zhongli; Li Ning; Li Guohua; Zhang Enxia
收藏  |  浏览/下载:17/0  |  提交时间:2011/08/16
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文
chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: art. no. 106106
Tang HM (Tang Hai-Ma); Zheng ZS (Zheng Zhong-Shan); Zhang EX (Zhang En-Xia); Yu F (Yu Fang); Li N (Li Ning); Wang NJ (Wang Ning-Juan)
收藏  |  浏览/下载:48/0  |  提交时间:2010/11/02
Total Dose Radiation-Hard 0. SOI CMOS Transistors and ASIC 期刊论文
半导体学报, 2006, 卷号: 27, 期号: 10, 页码: 1750-1754
Xiao Zhiqiang; Hong Genshen; Zhang Bo; Liu Zhongli
收藏  |  浏览/下载:23/0  |  提交时间:2010/11/23
Sensitivity of Total-Dose Radiation Hardness of SIMOX Buried Oxides to Doses of Nitrogen Implantation into Buried Oxides 期刊论文
半导体学报, 2005, 卷号: 26, 期号: 5, 页码: 862-866
Zheng Zhongshan; Liu Zhongli; Zhang Guoqiang; Li Ning; Li Guohua; Ma Hongzhi; Zhang Enxia; Zhang Zhengxuan; Wang Xi
收藏  |  浏览/下载:16/0  |  提交时间:2010/11/23
Effect of the technology of implanting nitrogen into buried oxide on the radiation hardness of the top gate oxide for partially depleted SOIPMOSFET 期刊论文
chinese physics, 2005, 卷号: 14, 期号: 3, 页码: 565-570
Zheng ZS; Liu ZL; Zhang GQ; Li N; Fan K; Zhang EX; Yi WB; Chen M; Wang X
收藏  |  浏览/下载:24/0  |  提交时间:2010/03/17
Improvement of the radiation hardness of SIMOX buried layers using nitrogen implantation 期刊论文
semiconductor science and technology, 2005, 卷号: 20, 期号: 6, 页码: 481-484
Zheng ZS; Liu ZL; Zhang GQ; Li N; Li GH; Ma HZ; Zhang EX; Zhang ZX; Wang X
收藏  |  浏览/下载:32/5  |  提交时间:2010/03/17
OXIDES  
Radiation hardness improvement of separation-by-implantation-of-oxygen/silicon-on-insulator material by nitrogen ion implantation 期刊论文
journal of electronic materials, 2005, 卷号: 34, 期号: 11, 页码: l53-l56
Zhang EX; Sun JY; Chen J; Zhang ZX; Wang X; Li N; Zhang GQ; Liu ZL
收藏  |  浏览/下载:193/29  |  提交时间:2010/03/17


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