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Nanofabrication of 30 nm Au zone plates by e-beam lithography and pulse voltage electroplating for soft x-ray imaging 期刊论文
MICROELECTRONIC ENGINEERING, 2020, 卷号: 225, 页码: -
作者:  Zhu, JY;  Chen, YF;  Xie, SS;  Zhang, LJ;  Wang, CP
收藏  |  浏览/下载:23/0  |  提交时间:2021/09/06


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