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Modeling of Flexible Composite Mold for Nanoimprint Lithography 期刊论文
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2018, 卷号: 54, 页码: 170-181
作者:  Li, Yanqiang;  Lan, Hongbo;  Xu, Quan;  Liang, Sen;  Liu, Hongzhong
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