| Modeling of Flexible Composite Mold for Nanoimprint Lithography | |
| Li, Yanqiang; Lan, Hongbo; Xu, Quan; Liang, Sen; Liu, Hongzhong | |
| 刊名 | Jixie Gongcheng Xuebao/Journal of Mechanical Engineering
 |
| 2018 | |
| 卷号 | 54页码:170-181 |
| 关键词 | Composite stamps Flexible composites Fundamental design Micro/nano-scale Mold deformation Nano-manufacturing Simulation and experimental verifications Theoretical modeling |
| ISSN号 | 0577-6686 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2922291 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Li, Yanqiang,Lan, Hongbo,Xu, Quan,et al. Modeling of Flexible Composite Mold for Nanoimprint Lithography[J]. Jixie Gongcheng Xuebao/Journal of Mechanical Engineering,2018,54:170-181. |
| APA | Li, Yanqiang,Lan, Hongbo,Xu, Quan,Liang, Sen,&Liu, Hongzhong.(2018).Modeling of Flexible Composite Mold for Nanoimprint Lithography.Jixie Gongcheng Xuebao/Journal of Mechanical Engineering,54,170-181. |
| MLA | Li, Yanqiang,et al."Modeling of Flexible Composite Mold for Nanoimprint Lithography".Jixie Gongcheng Xuebao/Journal of Mechanical Engineering 54(2018):170-181. |
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