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| Investigation of high aspect ratio multi-level contact holes etching process in three-dimensional flash memory manufacturing 会议论文
作者: Yuqi Wang; Lipeng Liu; Baoyou Chen; Wenjie Zhang; Chuanbin Zeng
  收藏 | 浏览/下载：22/0 | 提交时间：2019/05/13 |
| Investigation of Reducing Bow during High Aspect Ratio Trench Etching in 3D NAND Flash Memory 会议论文
作者: Huo ZL(霍宗亮); Liu LP(刘立芃); Xia ZL(夏志良); Yuan Y(袁野)
收藏 | 浏览/下载：25/0 | 提交时间：2019/05/16 |
| A stretchable transparent conductive film based on polymer microspheres lithography technology 会议论文
上海, 2018
作者: Xinyu Zhang; Yougen Hu; Wenlong Jiang; Pengli Zhu; Rong Sun
收藏 | 浏览/下载：27/0 | 提交时间：2019/01/31 |
| Hydrothermal assembly of one-dimensional boron nitride nanostructures 会议论文
上海, 2018
作者: Guang Yang; Haixu Wang; Ning Wang; Rong Sun; Ching-Ping Wong
收藏 | 浏览/下载：19/0 | 提交时间：2019/01/31 |
| Effect of micro-crack and reaction product on laser damage performance of optical glass during chemical etching 会议论文
作者: Xiao, Huapan; Chen, Zhi; Wang, Hairong; Liang, Rongguang; Yu, Na
收藏 | 浏览/下载：24/0 | 提交时间：2019/11/19
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| Effect of ion bombardment time on the profile of atomic layer etching 会议论文
2nd Asia-Pacific Conference on Plasma Physics
作者: Dai ZL(戴忠玲); Dong W(董婉); Song YH(宋远红); Wang YN(王友年)
收藏 | 浏览/下载：12/0 | 提交时间：2019/12/02 |
| Effect of plasma uniformity on etching profiles 会议论文
The 71st Annual Gaseous Electronics Conference
作者: Dong W(董婉); Wang XF(王喜凤); Song YH(宋远红); Dai ZL(戴忠玲); Wang YN(王友年)
收藏 | 浏览/下载：6/0 | 提交时间：2019/12/02 |
| Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching 会议论文
Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
作者: Zhang Jingwen; Fan Bin; Li Zhiwei; Liu Xin; Li Bincheng
收藏 | 浏览/下载：27/0 | 提交时间：2019/08/23
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| Two-Dimensional Chemical Etching Process Simulation for Printed Circuit Heat Exchanger Channels Based on Cellular Automata Model 会议论文
作者: Xin, Fei; Ma, Ting; Chen, Yitung; Wang, Qiuwang
收藏 | 浏览/下载：3/0 | 提交时间：2019/11/26 |
| Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching 会议论文
作者: Zhang Jingwen; Fan Bin; Li Zhiwei; Liu Xin; Li Bincheng
收藏 | 浏览/下载：12/0 | 提交时间：2019/11/15
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