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Photocarrier Radiometry Characterization of Ultra-shallow Junctions (USJ) in Silicon with Excimer Laser Irradiation 期刊论文
International Journal of Thermophysics, 2015, 卷号: 36, 期号: 5-6, 页码: 1173-1180
作者:  Wang, Qian;  Li, Bincheng;  Ren, Shengdong;  Wang, Qiang
收藏  |  浏览/下载:11/0  |  提交时间:2016/11/21


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