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A novel method for fabricating curved frequency selective surface via 3D printing technology 会议论文
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, IPTA 2014, May 13, 2014 - May 15, 2014, Beijing, China
Fengchao L.; Jinsong G.
收藏  |  浏览/下载:28/0  |  提交时间:2015/04/27
Research development of thermal aberration in 193nm lithography exposure system 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:  Wang, Yueqiang;  Liu, Yong
收藏  |  浏览/下载:20/0  |  提交时间:2016/11/23
Design of a projection objective with high numeric aperture and large view field 会议论文
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
作者:  Liu, Junbo;  Hu, Song;  Gao, Hongtao;  Zhao, Lixin;  Zhu, Xianchang
收藏  |  浏览/下载:15/0  |  提交时间:2016/11/24
Intelligent control system based on ARM for lithography tool 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:  Chen, Changlong;  Tang, Xiaoping;  Hu, Song;  Wang, Nan
收藏  |  浏览/下载:12/0  |  提交时间:2016/11/24
Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene 会议论文
Proceedings of SPIE: NANOPHOTONICS AND MICRO/NANO OPTICS II, 2014
作者:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Pang, Hui;  Cao, Axiu
收藏  |  浏览/下载:14/0  |  提交时间:2016/11/24
Fabrication of resonant subwavelength grating based on thiol-ene 会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:  Zhang, Man;  Deng, Qiling;  Shi, Lifang;  Li, Zhiwei;  Pang, Hui
收藏  |  浏览/下载:20/0  |  提交时间:2016/11/24


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