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科研机构
光电技术研究所 [5]
长春光学精密机械与物... [1]
内容类型
会议论文 [6]
发表日期
2014 [6]
学科主题
ARM proces... [1]
Bar codes ... [1]
Casting - ... [1]
High numer... [1]
nano-pilla... [1]
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发表日期:2014
内容类型:会议论文
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A novel method for fabricating curved frequency selective surface via 3D printing technology
会议论文
International Symposium on Optoelectronic Technology and Application 2014: Laser Materials Processing; and Micro/Nano Technologies, IPTA 2014, May 13, 2014 - May 15, 2014, Beijing, China
Fengchao L.
;
Jinsong G.
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浏览/下载:28/0
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提交时间:2015/04/27
Research development of thermal aberration in 193nm lithography exposure system
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Wang, Yueqiang
;
Liu, Yong
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  |  
浏览/下载:20/0
  |  
提交时间:2016/11/23
Design of a projection objective with high numeric aperture and large view field
会议论文
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014
作者:
Liu, Junbo
;
Hu, Song
;
Gao, Hongtao
;
Zhao, Lixin
;
Zhu, Xianchang
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  |  
浏览/下载:15/0
  |  
提交时间:2016/11/24
Intelligent control system based on ARM for lithography tool
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Chen, Changlong
;
Tang, Xiaoping
;
Hu, Song
;
Wang, Nan
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  |  
浏览/下载:12/0
  |  
提交时间:2016/11/24
Fabrication of nano-pillar with sub-100nm resolution based on thiol-ene
会议论文
Proceedings of SPIE: NANOPHOTONICS AND MICRO/NANO OPTICS II, 2014
作者:
Zhang, Man
;
Deng, Qiling
;
Shi, Lifang
;
Pang, Hui
;
Cao, Axiu
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  |  
浏览/下载:14/0
  |  
提交时间:2016/11/24
Fabrication of resonant subwavelength grating based on thiol-ene
会议论文
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Zhang, Man
;
Deng, Qiling
;
Shi, Lifang
;
Li, Zhiwei
;
Pang, Hui
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  |  
浏览/下载:20/0
  |  
提交时间:2016/11/24
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