异层集成电路显微图像对准与线网自动跟踪

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题名	异层集成电路显微图像对准与线网自动跟踪
作者	丁迎
学位类别	工学硕士
答辩日期	1999-05-01
授予单位	中国科学院自动化研究所
授予地点	中国科学院自动化研究所
导师	洪继光
关键词	集成电路显微图像图像对准相位相关相关系数快速傅立叶变换线网跟踪图像拼接伪匹配 IC micro-image Image registration phase correlation corrclation coefficient FFT Trace Image mosaicing Pseudo-match
学位专业	模式识别与智能系统
中文摘要	图像对准是图像处理中的一项基本任务。它用于匹配两幅或多幅包含相同景物的图像，这些图像可能来自不同的拍摄时间、不同的传感器或不同的视点。本文的第一部分解决集成电路异层显微图像的对准问题。腐蚀去锚造成的灰度变化是显微图像对准的主要困难，本文通过实验分析了各种经典对准算法的优缺点，提出由粗到精的两级匹配机制：先用相位相关法进行大范围的粗匹配，再用相关系数法进行精确匹配，相位相关算法和相关系数法均用FFT实现。该方法具有速度快，精度高，鲁棒性好等优点，应用在异层集成电路显微图像对准问题上取得了很好的效果，对于其它图像对准问题也具有参考价值。基于两层图像的线网跟踪是本课题的另一部分重要内容。本文综合对准后的两层图像中的丰富信息，提出了基于知识约束的，结构元整体识别方法。该方法使用简单的跟踪算子和判别算子，充分利用引线孔周围和对应层的信息进行判别，克服了引线孔本身的识别困难。实验表明，结构元的整体识别方法符合专家人工跟踪线网的规律，具有独特的优越性。在同层图像拼接过程中，如果发生图像同构，即当相邻两幅图像的重叠区域无明显特征，或者存在多个特征相似的部分，就会出现伪匹配而导致拼接失败。本文基于均方差曲线和相邻图像之间的约束关系，提出了一种判断图像伪匹配的判别和解决方法。由于这部分内容自成体系，以附录的方式把它安排在论文后面。
英文摘要	Image registration is a fundamental task in image processing used to match two or more pictures taken, for example, at different times, from different sensors, or from different viewpoints. The first part of the thesis is concentrated on the problem of two layer IC micro- images registration. Variations of intensities between the two images which caused by eroding is the most difficulty in image registration. We analyze the merits and disadvantage of several classic registration algorithms through experiments. A two steps algorithm is designed to match image from coarse to fine scale. First, phase correlation method is used to get coarse result on large scope, then correlation coefficient method is used to get precise result. Both of them are implemented by FFT. The method is last, accurate, high noise-robust and have a good result in IC micro-image registration. It has theoretical and practical value in other image registration problems. IC wire net recognition and auto-trace based on two layer images is another important part of the thesis. An integral approach for structure unit recognition based on IC knowledge constraints is developed. Using abundance information of two layer images and the information around the wire hole, the track operator and the discrimination operator is designed to recognise the wire hole. Experimental results indicate that our integral recognition approach accords with the work of experts and has special advantages. Image mosaicing is to "stitching" together overlapping multiple images into a large image. One of the difficulties in image mosaicing is, when the overlapping region has not evident features or has many similar features, pseudo-match will happen and cause mosaicing failure. Based on MSE curve and constraints between the images, an approach was proposed for distinguishing and solving of pseudo-match. Experiment results demonstrate the efficiency of this method. As the independence of this part, it was attached as appendix at the back of the thesis.
语种	中文
其他标识符	513
内容类型	学位论文
源URL	[http://ir.ia.ac.cn/handle/173211/7260]
专题	毕业生_硕士学位论文
推荐引用方式 GB/T 7714	丁迎. 异层集成电路显微图像对准与线网自动跟踪[D]. 中国科学院自动化研究所. 中国科学院自动化研究所. 1999.