A charge-amplifier based self-sensing method for measurement of piezoelectric displacement | |
Du, Zhangming2,3; Zhang, Tianlu2,3; Deng, Lu1; Zhou, Chao3; Cao, Zhiqiang3; Wang, Shuo3 | |
2017-08 | |
会议日期 | 2017-08-06 |
会议地点 | Takamatsu, Japan |
关键词 | Nano manipulation, self-sensing, position measure, sensor characteristics |
DOI | 10.1109/ICMA.2017.8016124 |
英文摘要 | Manipulation in nano-scale is important to the development of Nano-technology, while position sensing is the base of nano-manipulation. Self-sensing is a method providing true sensor-actuator collocation and especially suitable for room-limited workspace. This paper introduced a self-sensing method for displacement measurement, based on charge amplifier. The principle of self-sensing was derived from piezoelectric constitutive equations, and a charge amplifier circuit was developed to obtain the displacement of piezoelectric stack. A series of experiments were conducted to evaluate the characteristics of our method. The results of the experiments and some characteristics of charge-amplifier based self-sensing method were presented. |
会议录出版者 | IEEE |
语种 | 英语 |
内容类型 | 会议论文 |
源URL | [http://ir.ia.ac.cn/handle/173211/48476] |
专题 | 自动化研究所_复杂系统管理与控制国家重点实验室_先进机器人控制团队 |
通讯作者 | Zhou, Chao |
作者单位 | 1.Central University of Finance and Economics 2.University of Chinese Academy of Sciences 3.Institute of Automation, Chinese Academy of Sciences |
推荐引用方式 GB/T 7714 | Du, Zhangming,Zhang, Tianlu,Deng, Lu,et al. A charge-amplifier based self-sensing method for measurement of piezoelectric displacement[C]. 见:. Takamatsu, Japan. 2017-08-06. |
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