An AFM based nanomanipulation system with 3D nano forces feedback

CORC > 沈阳自动化研究所 > 中国科学院沈阳自动化研究所 > 机器人学研究室

	An AFM based nanomanipulation system with 3D nano forces feedback
	Tian XJ(田孝军); Jiao ND(焦念东); Liu LQ(刘连庆); Wang YC(王越超); Dong ZL(董再励); Li WJ(李文荣)
	2004
会议日期	August 26-31, 2004
会议地点	Chengdu, China
关键词	Nanomanipulation System 3d Nano Forces Sensing Lateral Error Compensating Of Probe Positioning
页码	18-22
英文摘要	In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative analysis based on the authors' previous work. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are presented to verify the effectiveness of the nanomanipulation system.
源文献作者	Hong Kong Univ Sci & Technol, Kagawa Univ, Univ Electro Commun, Natl Nat Sci Fdn China, Shanghai Univ, Harbin Engn Univ, Japan Soc Precis Engn, IEEE Robot & Automat Soc, IEEE Syst, Man & Cybernet Soc, IEEE Shikoku Sect, Chinese Inst Elect, Chinese Soc Mech Engn, China Cleaning Engn Technol Cooperat Assoc, Robot Soc Japan, Int Mechatron Forum, JSPE, Tech Comm Intell Mechatron, Minist Educ, China
产权排序	1
会议录	PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION
会议录出版者	IEEE
会议录出版地	NEW YORK
语种	英语
ISBN号	0-7803-8748-1
WOS记录号	WOS:000225452400005
内容类型	会议论文
源URL	[http://ir.sia.cn/handle/173321/8556]
专题	沈阳自动化研究所_机器人学研究室
通讯作者	Tian XJ(田孝军)
作者单位	1.Department of Electrical Engineering, Michigan State University, United States 2.Shenyang Institute of Automation, Chinese Academy of Science, China 3.Graduate School, Chinese Academy of Science, China 4.Department of Automation, Chinese University of Hong Kong, Hong Kong, Hong Kong
推荐引用方式 GB/T 7714	Tian XJ,Jiao ND,Liu LQ,et al. An AFM based nanomanipulation system with 3D nano forces feedback[C]. 见:. Chengdu, China. August 26-31, 2004.