3D nano forces sensing for an AFM based nanomanipulator | |
Tian XJ(田孝军); Liu LQ(刘连庆); Jiao ND(焦念东); Wang YC(王越超); Dong ZL(董再励) | |
2004 | |
会议日期 | June 21-25, 2004 |
会议地点 | Hefei, China |
关键词 | Afm Based Nanomanipulator 3d Nano Forces Modeling Parameters Calibration |
页码 | 208-212 |
英文摘要 | Atomic Force Microscope (AFM) has been proven to be a useful tool to characterize and change the sample surface down to the nanometer scale. However, in the AFM based nano manipulation, the main problem is the lack of real-time sensory feedback for a user, which makes the manipulation almost in the dark and inefficient. In this paper, the AFM probe micro cantilever-tip is used not only as an end effector but also as a three dimensional (3D) nano forces sensor for measuring the interactive forces between the AFM probe tip and the object or substrate in nanomanipulation. The nano forces acting on cantilever-tip is modeled and the real-time PSD signals are used to calculate the forces. With new parameters calibration method used, the real 3D nano forces can be easily got and then fed to a haptic/force device for operator to feel, thus real-time manipulation forces information is obtained, with which the efficiency of nanomanipulation can be significantly improved. Nano-imprint experiments verify the effectiveness of 3D forces sensing system and efficiency improvement of nano manipulation using this system. |
源文献作者 | Int Assoc Informat Acquisit, Int Journal Informat Acquisit, IEEE Robot & Automat Soc, Natl Nat Sci Fdn China, Inst Intelligent Mach, Univ Sci & Technol China |
产权排序 | 1 |
会议录 | ICIA 2004: Proceedings of 2004 International Conference on Information Acquisition
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会议录出版者 | IEEE |
会议录出版地 | NEW YORK |
语种 | 英语 |
ISBN号 | 0-7803-8629-9 |
WOS记录号 | WOS:000228481300049 |
内容类型 | 会议论文 |
源URL | [http://ir.sia.cn/handle/173321/8458] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Tian XJ(田孝军) |
作者单位 | 1.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States 2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 3.Graduate School, Chinese Academy of Sciences, Beijing 100039, China |
推荐引用方式 GB/T 7714 | Tian XJ,Liu LQ,Jiao ND,et al. 3D nano forces sensing for an AFM based nanomanipulator[C]. 见:. Hefei, China. June 21-25, 2004. |
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