| Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS | |
| Li, Yun; Ma, Yao; Lin, Wei; Dong, Peng; Yang, Zhimei; Gong, Min; Bi, Jinshun; Li, Bo; Xi, Kai; Xu, Gaobo | |
| 刊名 | SUPERLATTICES AND MICROSTRUCTURES
 |
| 2018 | |
| 卷号 | Vol.120页码:313-318 |
| 关键词 | TiN/HfO2/Si MOS capacitor gamma-ray irradiation Oxide trapped and interface trapped C-V DLTS |
| ISSN号 | 0749-6036 |
| URL标识 | 查看原文 |
| 公开日期 | [db:dc_date_available] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5458677 |
| 专题 | 湖南大学 |
| 作者单位 | 1.Sichuan Univ, Coll Phys Sci & Technol, Key Lab Microelect Sichuan Prov, Chengdu 610064, Sichuan, Peoples R China 2.Sichuan Univ, Key Lab Radiat Phys & Technol, Minist Educ, Chengdu 610064, Sichuan, Peoples R China 3.China Acad Engn Phys, Microsyst & Terahertz Res Ctr, Mianyang 621999, Peoples R China 4.China Acad Engn Phys, Inst Elect Engn, Mianyang 621999, Peoples R China 5.Chinese Acad Sci, Inst Microeletron, Beijing 100029, Peoples R China 6.Univ Chinese Acad Sci, Beijing 100029, Peoples R China |
| 推荐引用方式 GB/T 7714 | Li, Yun,Ma, Yao,Lin, Wei,et al. Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS[J]. SUPERLATTICES AND MICROSTRUCTURES,2018,Vol.120:313-318. |
| APA | Li, Yun.,Ma, Yao.,Lin, Wei.,Dong, Peng.,Yang, Zhimei.,...&Xu, Gaobo.(2018).Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS.SUPERLATTICES AND MICROSTRUCTURES,Vol.120,313-318. |
| MLA | Li, Yun,et al."Study of gamma-ray irradiation influence on TiN/HfO2/Si MOS capacitor by C-V and DLTS".SUPERLATTICES AND MICROSTRUCTURES Vol.120(2018):313-318. |
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