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	Benchmarking Process Integration and Layout Decomposition of Directed Self-Assembly and Self-Aligned Multiple Patterning Techniques (CPCI-S收录)
	Chen, Yijian[1]; Zhou, Jun[1]; You, Jun[1]; Liu, Hongyi[1]
会议名称	DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII
关键词	directed self-assembly (DSA) self-aligned multiple patterning (SAMP) self-aligned quadruple patterning (SAQP) template mandrel layout decomposition
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2046147
专题	华南理工大学
作者单位	Peking Univ, Shenzhen Grad Sch, Sch Elect & Comp Engn, Shenzhen 518055, Guangdong, Peoples R China
推荐引用方式 GB/T 7714	Chen, Yijian[1],Zhou, Jun[1],You, Jun[1],等. Benchmarking Process Integration and Layout Decomposition of Directed Self-Assembly and Self-Aligned Multiple Patterning Techniques (CPCI-S收录)[C]. 见:DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY VIII.

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