CORC

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CORC

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MORPHOLOGY CONTROL OF MICROCHANNEL CROSS-SECTION USING SACRIFICIAL SPINNING FIBER 其他
2017-01-01
Zhang, Yangxi; Jing, Huize; Xu, Kaisi; Gao, Chencheng; Hao, Yilong; Meng, Fanrui; Gui, Yiming; Chen, Guoxing
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
A LOW-COST FLEXIBLE ELECTROCHEMICAL ACCELEROMETER USING GRAPHENE-INTEGRATED MICROCHANNEL 其他
2017-01-01
Zhang, Yangxi; Li, Ze; Xu, Kaisi; Gao, Chencheng; Hao, Yilong; Meng, Fanrui; Gui, Yiming
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Graphene water transfer printing for 3D surface 其他
2016-01-01
Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Li, Linyu; Gao, Chencheng; Zhu, Hongwei; Hao, Yilong
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
GRAPHENE WATER TRANSFER PRINTING FOR 3D SURFACE 其他
2016-01-01
Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Li, Linyu; Gao, Chencheng; Zhu, Hongwei; Hao, Yilong
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
FILMS  
Design and Simulation of Corrugated Diaphragm Applied to the MEMS Fiber Optic Pressure Sensor 其他
2016-01-01
Gui, Yiming; Zhang, Yangxi; Liu, Guandong; Hao, Yilong; Gao, Chengchen
收藏  |  浏览/下载：6/0  |  提交时间：2017/12/03
Design of a Graphene Capacitive Pressure Sensor for Ultra-low Pressure Detection 其他
2016-01-01
Zhang, Yangxi; Gui, Yiming; Meng, Fanrui; Gao, Chengchen; Hao, Yilong
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Field-assisted titanium-glass bonding 其他
2014-01-01
Li, Tianyu; Zhang, Yiming; Luo, Jin; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/17
Inductively coupled plasma etching of bulk tungsten for MEMS applications 其他
2014-01-01
Song, Lu; Li, Nannan; Zhang, Shibin; Luo, Jin; Hu, Jia; Zhang, Yiming; Chen, Shuhui; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Chemical-Mechanical Polishing of Bulk Tungsten Substrate 其他
2013-01-01
Luo, Jin; Zhang, Yiming; Song, Lu; Chen, Shuhui; Bian, Yuan; Li, Tianyu; Hao, Yilong; Chen, Jing
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/16
In-situ measurement of ion angular distribution in bulk titanium DRIE for modeling the etch profile 其他
2013-01-01
Hu, Jia; He, Shuwei; Zhang, Yiming; Chen, Jing
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
IAD  SU-8  overhang  stiction  DRIE  model  

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