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Measurement of residual stress in a multi-layer semiconductor heterostructure by micro-Raman spectroscopy 期刊论文
ACTA MECHANICA SINICA, 2016, 卷号: 32, 页码: 805-812
作者:  Qiu, Wei;  Cheng, Cui-Li;  Liang, Ren-Rong;  Zhao, Chun-Wang;  Lei, Zhen-Kun
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/09


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