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光电技术研究所 [40]
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期刊论文 [38]
会议论文 [2]
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High precision locating control system based on VCM for Talbot lithography
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850L
作者:
Yao, Jingwei
;
Zhao, Lixin
;
Deng, Qian
;
Hu, Song
收藏
  |  
浏览/下载:35/0
  |  
提交时间:2018/06/14
Control Systems
Digital Signal Processors
Efficiency
Feedback
Lithography
Manufacture
Materials Testing
Optical Devices
Signal Processing
Structural Design
Three Term Control Systems
Modeling and experimental study of plasmonic lens imaging with resolution enhanced methods
期刊论文
Optics Express, 2016, 卷号: 24, 期号: 24, 页码: 27115-27126
作者:
Zhao, Zeyu
;
Luo, Yunfei
;
Yao, Na
;
Zhang, Wei
;
Wang, Changtao
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/06/14
Electric Fields
Masks
Nanolithography
Numerical Methods
Optical Transfer Function
Plasmons
Surface Plasmon Resonance
Tight focusing of radially and azimuthally polarized light with plasmonic metalens
期刊论文
OPTICS COMMUNICATIONS, 2015, 卷号: 356, 页码: 445-450
作者:
Luo, Jun
;
Zhao, Zeyu
;
Pu, Mingbo
;
Yao, Na
;
Tang, Dongliang
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2015/12/04
Metamaterials
Lenses
Plasmonics
Nanophotonics
Forming Sub-32-nm High-Aspect Plasmonic Spot via Bowtie Aperture Combined with Metal-Insulator-Metal Scheme
期刊论文
PLASMONICS, 2015, 卷号: 10, 期号: 6, 页码: 1607-1613
作者:
Wang, Yaohui
;
Yao, Na
;
Zhang, Wei
;
He, Jiayu
;
Wang, Changtao
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2016/02/03
Nanolithography
Surface plasmon
Sub-wavelength structures
Nanostructure
Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
期刊论文
SCIENTIFIC REPORTS, 2015, 卷号: 5
作者:
Zhao, Zeyu
;
Luo, Yunfei
;
Zhang, Wei
;
Wang, Changtao
;
Gao, Ping
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2015/12/04
Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography
期刊论文
ADVANCED OPTICAL MATERIALS, 2015, 卷号: 3, 期号: 9, 页码: 1248-1256
作者:
Liang, Gaofeng
;
Wang, Changtao
;
Zhao, Zeyu
;
Wang, Yanqin
;
Yao, Na
收藏
  |  
浏览/下载:41/0
  |  
提交时间:2015/12/04
Large scale manipulation of the dark spot by phase modulation of azimuthally polarized light
期刊论文
OPTICS COMMUNICATIONS, 2015, 卷号: 349, 页码: 125-131
作者:
Chen, Weiguo
;
Wang, Jiong
;
Zhao, Zeyu
;
Wang, Changtao
;
Wang, YanQin
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2015/09/21
Binary phase plate
Azimuthally polarized light
Size-tunable dark spot
Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination
期刊论文
SCIENTIFIC REPORTS, 2015, 卷号: 5, 页码: 15320
作者:
Zhao, Zeyu
;
Luo, Yunfei
;
Zhang, Wei
;
Wang, Changtao
;
Gao, Ping
收藏
  |  
浏览/下载:11/0
  |  
提交时间:2016/11/22
Tight focusing of radially and azimuthally polarized light with plasmonic metalens
期刊论文
OPTICS COMMUNICATIONS, 2015, 卷号: 356, 页码: 445-450
作者:
Luo, Jun
;
Zhao, Zeyu
;
Pu, Mingbo
;
Yao, Na
;
Tang, Dongliang
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2016/11/22
Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography
期刊论文
Advanced Optical Materials, 2015, 卷号: 3, 期号: 9, 页码: 1248-1256
作者:
Liang, Gaofeng
;
Wang, Changtao
;
Zhao, Zeyu
;
Wang, Yanqin
;
Yao, Na
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2016/11/22
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