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MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF SILICON CARBONITRIDE DIELECTRIC BARRIER FILMS DEPOSITED BY SPUTTERING 期刊论文
2018, 卷号: 25, 期号: 3
作者:  Peng, Yinqiao[1];  Zhou, Jicheng[2];  Gong, Jiehong[3];  Yu, Qinrong[3];  Lei, Guibin[4]
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/26
Microstructure and optical properties of SiCN thin films deposited by reactive magnetron sputtering 期刊论文
2014, 卷号: 131, 页码: 148
作者:  Peng, Yinqiao[1];  Zhou, Jicheng[2];  Gong, Jiehong[3];  Yu, Qinrong[3]
收藏  |  浏览/下载:8/0  |  提交时间:2019/12/26
Structural and optical properties of the SiCN thin films prepared by reactive magnetron sputtering 期刊论文
2011, 卷号: 257, 期号: 9, 页码: 4010
作者:  Peng, Yinqiao[1,2];  Zhou, Jicheng[1];  Zhao, Baoxing[1];  Tan, Xiaochao[1];  Zhang, Zhichao[1]
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/26


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