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Modular ultrahigh vacuum-compatible gas-injection system with an adjustable gas flow for focused particle beam-induced deposition 期刊论文
Journal of Vacuum Science and Technology. A: Vacuum, Surfaces and Films, 2009, 卷号: Vol.27 No.5, 页码: 1204-1210
作者:  Huth,M.;  Klingenberger,D.
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