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CORC

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Complexing Between Additives and Ceria Abrasives Used for Polishing Silicon Dioxide and Silicon Nitride Films 期刊论文
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 卷号: 14, 期号: 3, 页码: H128-H131
Wang,LY; Liu,B; Song,ZT; Liu,WL; Feng,SL; Huang,D; Babu,SV
收藏  |  浏览/下载：13/0  |  提交时间：2012/04/10
Complexing Between Additives and Ceria Abrasives Used for Polishing Silicon Dioxide and Silicon Nitride Films 期刊论文
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 卷号: 14, 期号: 3, 页码: H128-H131
Wang, LY; Liu, B(重点实验室）; (重点实验室）; song, zt(重点实验室）; Liu, WL; Feng, SL(重点实验室）; Huang, D; Babu, SV
收藏  |  浏览/下载：12/0  |  提交时间：2013/05/10
Study of GaN epilayers growth on freestanding Si cantilevers 期刊论文
SOLID-STATE ELECTRONICS, 2010, 卷号: 54, 期号: 1, 页码: 4-7
Chen, J; Wang, X; Wu, AM; Zhang, B; Wang, X; Wu, YX; Zhu, JJ; Yang, H杨辉
收藏  |  浏览/下载：16/0  |  提交时间：2011/11/04
Mechanism of selective Si3N4 etching over SiO2 in hydrogen-containing fluorocarbon plasma 期刊论文
MICROELECTRONIC ENGINEERING, 2009, 卷号: 86, 期号: 11, 页码: 2354-2357
Chen, LL; Xu, LD; Li, DX; Lin, B
收藏  |  浏览/下载：20/0  |  提交时间：2012/03/24
Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films 期刊论文
THIN SOLID FILMS, 2009, 卷号: 517, 期号: 6, 页码: 1989-1994
Zhou, W; Yang, JL; Li, Y; Ji, A; Yang, FH; Yu, YD
收藏  |  浏览/下载：9/0  |  提交时间：2012/03/24
Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films 期刊论文
THIN SOLID FILMS, 2009, 卷号: 517, 期号: 5 Pages, 页码: 1989-1994
Zhou, W; Yang, JL; Li, Y; Ji, A; Yang, FH; Yu, YD
收藏  |  浏览/下载：9/0  |  提交时间：2012/05/12
An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer 期刊论文
SENSORS, 2009, 卷号: 9, 期号: 3 Pages, 页码: 1330-1338
Chen, DY; Wu, ZW; Liu, L; Shi, XJ; Wang, JB
收藏  |  浏览/下载：10/0  |  提交时间：2012/05/12
Characterization of bonded silicon-on-aluminum-nitride wafers with RBS, TEM and HRXRD techniques 期刊论文
MICROELECTRONIC ENGINEERING, 2008, 卷号: 85, 期号: 8, 页码: 1807-1810
Men, CL; Lin, CL
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/24
Investigation of the extinction coefficient of PECVD hydrogenated amorphous silicon nitride films 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 卷号: 18, 期号: 8, 页码: 85001-85001
Yan, X; Feng, F; Yang, GL; Wang, YL
收藏  |  浏览/下载：19/0  |  提交时间：2011/12/17
Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si(3)N(4) and SiO(2)/Si(3)N(4) Diaphragms 期刊论文
IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2008, 卷号: 17, 期号: 1 Pages, 页码: 1120-1134
Yang, JL; Gaspar, J; Paul, O
收藏  |  浏览/下载：11/0  |  提交时间：2012/05/12

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