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Investigation on the controllable growth of monodisperse silica colloid abrasives for the chemical mechanical polishing application 期刊论文
MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 9, 页码: 1751-1755
Hu, XK; Song, ZT; Wang, HB; Liu, WL; Zhang, ZF
收藏  |  浏览/下载：17/0  |  提交时间：2012/03/24
Micromachining SU-8 pivot structures using AZ photoresist as direct sacrificial layers for a large wing displacement 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 卷号: 20, 期号: 2, 页码: 25005-25005
Bao, XQ; Dargent, T; Cattan, E
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
Strain relaxation in nano-patterned strained-Si/SiGe heterostructure on insulator 期刊论文
APPLIED SURFACE SCIENCE, 2010, 卷号: 256, 期号: 11, 页码: 3499-3502
Liu, XY; Liu, WL; Ma, XB; Lv, SL; Song, ZT; Lin, CL
收藏  |  浏览/下载：10/0  |  提交时间：2012/03/24
Strain Stability and Carrier Mobility Enhancement in Strained Si on Relaxed SiGe-on-Insulator 期刊论文
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 卷号: 157, 期号: 1, 页码: H104-H108
Ma, XB; Liu, WL; Liu, XY; Du, XF; Song, ZT; Lin, CL; Chu, PK
收藏  |  浏览/下载：14/0  |  提交时间：2012/03/24
A micromachining technology for integrating low-loss GHz RF passives on non-high-resistivity low-cost silicon MCM substrate 期刊论文
MICROELECTRONIC ENGINEERING, 2010, 卷号: 87, 期号: 11, 页码: 2247-2252
Wu, ZZ; Li, XX
收藏  |  浏览/下载：5/0  |  提交时间：2011/12/17
A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon Wafers 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2010, 卷号: 19, 期号: 6, 页码: 1515-1520
Wang, JC; Li, XX
收藏  |  浏览/下载：12/0  |  提交时间：2011/12/17
A hybrid-type electrostatically driven microgripper with an integrated vacuum tool 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2010, 卷号: 158, 期号: 2, 页码: 320-327
Chen, T; Sun, LN; Chen, LG; Rong, WB; Li, XX
收藏  |  浏览/下载：7/0  |  提交时间：2011/12/17
A microfluidic chip for permeability assays of endothelial monolayer 期刊论文
BIOMEDICAL MICRODEVICES, 2010, 卷号: 12, 期号: 1, 页码: 81-88
Shao, JB; Wu, L; Wu, JZ; Zheng, YH; Zhao, H; Lou, XH; Jin, QH; Zhao, JL
收藏  |  浏览/下载：15/0  |  提交时间：2011/12/17
A dynamic collision model for improved over-range protection of cantilever-mass micromechanical accelerometers 期刊论文
MICROELECTRONICS JOURNAL, 2010, 卷号: 41, 期号: 6, 页码: 331-337
Yang, YL; Jiang, W; Zhang, K; Liu, M; Li, XX
收藏  |  浏览/下载：10/0  |  提交时间：2011/12/17
Hot embossing of electrophoresis microchannels in PMMA substrates using electric heating wires 期刊论文
ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2010, 卷号: 396, 期号: 7, 页码: 2715-2720
Gan, ZB; Yu, ZY; Chen, Z; Chen, G
收藏  |  浏览/下载：48/0  |  提交时间：2012/03/24

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